Development of high-functional optical and biological devices by ultra precise micro dies.

点击翻译按钮获取中文摘要

This research aims to realize high-functional optical and biological devices using precise micro dies.1. Precise Micro diesVery precise micro dies have been realized for the optical and biological devices by the newly developed Si 3D shape formation, thin film deposition, and micro electroplating technologies.(1) Micro dies for optical devices・Micro dies for the AWG (Arrayed Waveguide Grating) device have been designed and fabricated. The mother shape has been fabricated by the Si micro machining, and the shape has been fabricated by using also the SU-8 resist.・The micro die for the micro lens has been designed and fabricated considering the laser diode. By the electroplating technique, the micro die for the UV cure material has been realized.・The micro die with the sub-micron size gap pillars has been realized. The high aspect ratio pillar shapes could be transferred by the micro electroplating.(2) Micro dies for biological devices2. Optical and biological devicesThe plastic devices were fabricated by using the micro dies mentioned above.(1) Optical devices・The fabrication processes and conditions such as vacuum were optimized, and the AWG with the core size of 5 microns has been fabricated.・The feasibility of the mono-molecular layer thin film has been examined for the removal use of the micro dies.・The optical characteristics of the micro lens has been evaluated.(2) Biological devices・The insert process has been examined using the nano-inprint technology, and the biological chips have been fabricated with the very narrow gaps between the pillars. As the result, the shape transform of the aspect ratio of about 1 has been realized.As the result, using the technologies developed in this study, the high functional devices could be realized.