Development of high-functional optical and biological devices by ultra precise micro dies.

利用超精密微型模具开发高功能光学和生物器件。

• 批准号: 16310100
• 负责人: OOHIRA Fumikazu
• 金额: $ 9.86万
• 依托单位: Kagawa University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2004
• 资助国家: 日本
• 起止时间: 2004 至 2006
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-16310100/
• 关键词: micro dies; optical device; biological device; micro shape formation; transfer technology; nano inprint; optical waveguide; micro lens.; バイオチップ; 精密金型; マイクロマシン; フォトリソ技術; 光部品; 光導波; ナノテクノロジー; 成形技術; 光導波路

This research aims to realize high-functional optical and biological devices using precise micro dies.1. Precise Micro diesVery precise micro dies have been realized for the optical and biological devices by the newly developed Si 3D shape formation, thin film deposition, and micro electroplating technologies.(1) Micro dies for optical devices・Micro dies for the AWG (Arrayed Waveguide Grating) device have been designed and fabricated. The mother shape has been fabricated by the Si micro machining, and the shape has been fabricated by using also the SU-8 resist.・The micro die for the micro lens has been designed and fabricated considering the laser diode. By the electroplating technique, the micro die for the UV cure material has been realized.・The micro die with the sub-micron size gap pillars has been realized. The high aspect ratio pillar shapes could be transferred by the micro electroplating.(2) Micro dies for biological devices2. Optical and biological devicesThe plastic devices were fabricated by using the micro dies mentioned above.(1) Optical devices・The fabrication processes and conditions such as vacuum were optimized, and the AWG with the core size of 5 microns has been fabricated.・The feasibility of the mono-molecular layer thin film has been examined for the removal use of the micro dies.・The optical characteristics of the micro lens has been evaluated.(2) Biological devices・The insert process has been examined using the nano-inprint technology, and the biological chips have been fabricated with the very narrow gaps between the pillars. As the result, the shape transform of the aspect ratio of about 1 has been realized.As the result, using the technologies developed in this study, the high functional devices could be realized.

本研究的目的是利用精密微芯片实现高功能的光学和生物器件。精密微模具通过最新发展的硅三维形状形成、薄膜沉积和微电镀技术，实现了用于光学和生物器件的超精密微模具。(1)光学器件微模具·阵列波导光栅(AWG)器件微模具的设计和制造。用硅微机械加工制作了母体形状，并用SU-8抗蚀剂制作了母体形状。·结合激光二极管，设计并加工了微透镜的微模具。采用电镀技术，实现了紫外光固化材料的微模具。·实现了具有亚微米级间隙柱子的微型模具。微电镀可以转移高深宽比的柱状形状。(2)用于生物装置的微型模具。(1)光学器件·优化了真空等制备工艺和条件，制作出了芯尺寸为5微米的AWG。·考察了单分子层薄膜用于去除微芯片的可行性。·对微透镜的光学特性进行了评价。(2)生物器件：利用纳米压印技术研究了生物芯片的植入过程，制作出了柱间间隙非常窄的生物芯片。实现了长宽比约为1的形状变换，实现了高性能器件。