Absolute surface figure measurement of aspherical surfaces with diffracted wavefronts as reference waves emitted from two optical fibers

以衍射波前作为从两根光纤发射的参考波对非球面进行绝对面形测量

• 批准号: 16360067
• 负责人: KATAOKA Toshihiko
• 金额: $ 8.06万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2004
• 资助国家: 日本
• 起止时间: 2004 至 2006
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-16360067/
• 关键词: point diffraction interferometry; phase-shifting interferometry; single-mode optical fiber; absolute surface figure measurement; aspherical surface measurement; fiber optic plate; measurement error; spherical diffraction wave; 非球面観測; 点回折球面波干渉計

In this year, we have concentrated on to prevent unwanted interference fringes which occurs in phase-shifting interferometry of PS/PDI system. The interference fringes used in PS/PDI are projected on FOP (Fiber Optic Plate). The FOP is used to transfer the interference fringes from its front surface to rear surface. The FOP consists of a large number of optical fibers bundled together. Coherency of the transferred interference fringes decreased at the rear surface of FOP. Therefore CCD image of the fringes did not contain the unwanted fringes or patterns caused by end reflection of optics. Source of vibration was removed by using (1) CCD camera with electronic shutter, and (2) redesigning of shifting program for PZT stage. As a result, repeatability of concave mirror (diameter:200mm, ROC: 1500mm) measurement was estimated to be 0.38nm rms.With the results described above, we have tried to estimate measurement error of the PS/PDI system by phase shifting interferometry between two diffr … More acted waves emitted from optical fibers. As a result, b y removing (1) specifically-patterned error caused by FOP, and (2) fringe error caused by mechanical vibration of experimental environment, the measurement error of the PS/PDI was estimated to be 0.35nm rms. This value may not decrease until we protect an emergent mechanical vibration during the measurement procedure.In principle, the PS/PDI does not give us absolute surface figure directly in the measurement of aspherical surfaces because of a huge distortion of the diagnostic wavefront. Therefore we have tried to reconstruct the absolute surface figure using the PS/PDI result. We have made an original phase diagnostic program based on Helmholtz-Kirchhoff integral theorem. This program reconstructs very spherical surface figure using the result of PS/PDI and an intensity distribution of diagnostic spherical wavefront which reflected on the sample mirror. In the near future, an effectiveness of the program will be checked in the measurement of actual surface such as parabolic reflector. Less

在今年，我们集中精力防止在PS/PDI系统的相位转移干扰中发生不必要的干扰条纹。 PS/PDI中使用的干扰条纹投影在FOP（光纤板）上。 FOP用于将干扰条纹从其前表面转移到后表面。 FOP由大量捆绑在一起的光纤组成。在FOP的后表面，转移的干扰条纹的相干性下降。因此，条纹的CCD图像不包含由光学终端反射引起的不良条纹或模式。通过使用（1）CCD摄像头与电子快门进行振动源，以及（2）重新设计PZT阶段的转移程序。结果，凹面镜的可重复性（直径：200mm，ROC：1500mm）的测量估计为0.38nm rm。在上述结果中，我们试图通过相位转移的干扰估计PS/PDI系统的测量误差，这是两个差异之间的相位转移干扰…从光学纤维中发出的更多作用波。结果，删除（1）由FOP引起的特异性误差以及（2）由实验环境的机械振动引起的附带误差，PS/PDI的测量误差估计为0.35nm rms。在测量过程中我们保护紧急机械振动之前，该值可能不会降低。原则上，PS/PDI由于诊断波前的巨大变形，因此在测量非球面的测量中，PS/PDI不会直接给我们绝对的表面图。因此，我们试图使用PS/PDI结果重建绝对表面的数字。我们已经根据Helmholtz-Kirchhoff积分定理制定了原始的阶段诊断程序。该程序使用PS/PDI的结果以及反映在样品镜上的诊断球形波前的强度分布来重建球形表面图。在不久的将来，该程序的有效性将在测量实际表面（例如抛物线反射器）中检查。较少的

项目成果

Development of PS-PDI (Phase-Shifting Point Diffraction Interferometer) with optical fibers and FOW (Fiber Optic Window) as projection plane for absolute surface figure measurement of large apertured optics (in Japanese)

开发以光纤和 FOW（光纤窗口）为投影面的 PS-PDI（移相点衍射干涉仪），用于大孔径光学器件的绝对面形测量（日语）

• 发表时间: 2006
• 期刊: Proc. of fall meet of JSPE 2006 161
• 作者: 岡垣覚;中村崇亮;松浦敏晋;片岡俊彦;押鐘寧;井上晴行;中野元博;T.Matsuura et al.;T.Nakamura et al.;S.Okagaki et al.
• 通讯作者: S.Okagaki et al.

Development of PS-PDI (Phase-Shifting Point Diffraction Interferometer) with optical fibers and FOW (Fiber Optic Window) for absolute surface figure measurement (in Japanese)

开发用于绝对表面形状测量的光纤和 FOW（光纤窗口）PS-PDI（相移点衍射干涉仪）（日语）

• 发表时间: 2006
• 期刊: Proc. of annual meet of JSPE Kansai division 2006 B03
• 作者: 岡垣覚;中村崇亮;松浦敏晋;片岡俊彦;押鐘寧;井上晴行;中野元博;T.Matsuura et al.;T.Nakamura et al.
• 通讯作者: T.Nakamura et al.

FOW(Fiber Optic Window)投影面を用いた大口径ミラー絶対形状計測用ファイバ型PS-PDI(Phase-Shifting Point Diffraction Interferometer)装置の開発

开发利用FOW（光纤窗口）投影面测量大口径反射镜绝对形状的光纤型PS-PDI（移相点衍射干涉仪）装置

• 发表时间: 2006
• 期刊: 2006年度精密工学会秋季大会学術講演会 講演論文集
• 作者: 岡垣覚;中村崇亮;松浦敏晋;片岡俊彦;押鐘寧;井上晴行;中野元博
• 通讯作者: 中野元博

Absolute Figure Measurement of A Large Apertured Mirror by Point Diffraction Interferometer with Optical Fiber Sources

光纤源点衍射干涉仪对大孔径镜的绝对图形测量

• 发表时间: 2004
• 期刊: Proc. of fall meet of JSPE 2005 N14
• 作者: 押鐘寧;片岡俊彦;中村崇亮;井上晴行;中野元博;Y.Oshikane et al.
• 通讯作者: Y.Oshikane et al.

Development of PS-PDI (Phase-Shifting Point Diffraction Interferometer) with optical fibers -Estimation of measurement errors by interference between two spherical diffracted waves from optical fibers-(in Japanese)

使用光纤开发 PS-PDI（移相点衍射干涉仪） -通过光纤发出的两个球面衍射波之间的干涉来估计测量误差 -（日语）

• 发表时间: 2007
• 期刊: Proc. of spring meet of JSPE 2007 G25
• 作者: 松浦敏晋;岡垣覚;中村崇亮;押鐘寧;井上晴行;中野元博;片岡俊彦;T.Matsuura et al.;T.Matsuura et al.
• 通讯作者: T.Matsuura et al.