Hollow waveguides for extreme ultraviolet light and soft X ray

用于极紫外光和软 X 射线的空心波导

• 批准号: 16360164
• 负责人: MATSUURA Yuji
• 金额: $ 9.6万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2004
• 资助国家: 日本
• 起止时间: 2004 至 2005
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-16360164/
• 关键词: Hollow optical fibers; Vacuum ultraviolet; Soft x ray; Ultraviolet light delivery; X-ray delivery; Hollow wave guides; 紫外レーザ; 軟X線光学素子; エキシマレーザ; 真空紫外光源

The purpose of this project is to develop flexible and highly-effective waveguides for vacuum ultraviolet light and soft x ray. We propose hollow optical waveguides with vacuum hollow core which is almost highly transparent in vacuum ultraviolet and soft x ray regions.1. Loss reduction of hollow aluminum fibers for vacuum ultraviolet lightIn fabrication process for deposition of aluminum thin film on the inside of glass capillary tubing by using MOCVD process, the conditions for deposition pretreatment were optimized. As a result, hollow waveguides with low transmission losses are fabricated because of smoothness of inner aluminum film which induces little scattering losses.2. Development of remote spectroscopy system in vacuum ultravioletA remote spectroscopy system for ultraviolet wavelength region was developed by using a flexible hollow fibers with aluminum inner coating. Monochromated light is delivered by a hollow fiber to the target and reflected light is collected and transmitted back to photomultiplier. A bundled hollow fiber is also used for delivery media.3. Hollow optical fiber with one-dimensional photonic bandgap structureA hollow fiber with multilayered cladding which confine light by using the photonic bandgap of the cladding were proposed. From analysis of transmitted modes in the fiber, the optimized multilayer structure was designed. Fabrication process using a mandrel which is removed after deposition of multilayer on the outside was also proposed.4. Development of soft x-ray waveguideA collimating optics for soft x ray was fabricated by using a bundled hollow optical fibers. Hollow fibers with inner nickel layer which provides high reflection in soft x-ray region were fabricated and the transmission characteristics were compared with those of glass capillary optics.

该项目的目的是开发用于真空紫外光和软X射线的灵活且高效的波导。我们提出了具有真空空芯的空心光波导，它在真空紫外和软X射线区域几乎是高度透明的。 1．真空紫外光用空心铝纤维的减损在采用MOCVD工艺在玻璃毛细管内沉积铝薄膜的制备过程中，对沉积预处理条件进行了优化。由于内部铝膜光滑，散射损耗很小，因此可以制备出低传输损耗的空心波导。 2．真空紫外远程光谱系统的研制利用铝内涂层柔性中空纤维研制了紫外波长区的远程光谱系统。单色光通过中空纤维传送到目标，反射光被收集并传输回光电倍增管。成束的中空纤维也可用于输送介质。3．具有一维光子带隙结构的空心光纤提出了一种具有多层包层的空心光纤，该光纤利用包层的光子带隙来限制光。通过分析光纤中的传输模式，设计了优化的多层结构。还提出了使用心轴的制造工艺，在外部沉积多层膜后去除心轴。 4．软X射线波导的研制利用束状空心光纤制作了软X射线准直光学器件。制备了具有内镍层的空心光纤，该空心光纤在软 X 射线区域提供高反射，并将其传输特性与玻璃毛细管光学器件的传输特性进行了比较。

项目成果

X-ray opaque waveguide for dentistry

牙科用 X 射线不透明波导

• 发表时间: 2004
• 期刊: Photomedicine and Laser Surgery 22(3)
• 作者: T.J.Stephens;K.Iwai;Y.W.Shi;T.J.Stephens;K.Iwai;Y.W.Shi;Y.W.Shi;K.Iwai;K.Iwai;T.Dostalova;T.Dostalova
• 通讯作者: T.Dostalova

Hollow optical fibers for ultraviolet and vacuum ultraviolet light

• DOI: 10.1109/jstqe.2004.837710
• 发表时间: 2004-11-01
• 期刊: IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
• 影响因子: 4.9
• 作者: Matsuura, Y;Miyagi, M
• 通讯作者: Miyagi, M

Photonic bandgap fiber with a silica core and multilayer dielectric cladding

具有二氧化硅芯和多层电介质包层的光子带隙光纤

• 发表时间: 2004
• 期刊: Opt. Lett. 29・6
• 作者: Masato Murai;Yoshimichi Ohki;et al.;T.Dostalova.;Hirose T.;T Katagiri.
• 通讯作者: T Katagiri.

Bundled aluminum hollow-core fibers for delivery of ultraviolet laser beams

用于传输紫外激光束的束状铝空心光纤

• 发表时间: 2005
• 期刊: Opt.Eng. 44
• 作者: S. Kidera;Y. Kani;T. Sakamoto;and T. Sato;Hiroki Harada;Motoaki Mouri;山海 嘉之;O.Yilmaz
• 通讯作者: O.Yilmaz

Bundled aluminum hollow-care fibers for delivery of ultraviolet laser beams

用于传输紫外激光束的成束铝空心纤维

• 发表时间: 2005
• 期刊: Opt.Eng. 44・10
• 作者: T.Ito;H.Kato;Y.Ohki;Y.Matsuura;村田浩介;O.Yilmaz
• 通讯作者: O.Yilmaz