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Development of two-axis hall sensor array and magnetic field visualization system

两轴霍尔传感器阵列及磁场可视化系统开发

基本信息

批准号：
17360165
负责人：
KIM SeokBeom
金额：
$ 10.24万
依托单位：
Okayama University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2005
资助国家：
日本
起止时间：
2005 至 2007
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-17360165/
关键词：
magnetic sensor semiconductor junction of semiconductor magnetic field visualizing 2-axis magnetic field components Oxide superconducting film 磁気センター 2軸磁場成分測

项目摘要

The Hall sensor is very convenient magnetic sensor for measuring current density in a non-destructive and contactless way. It is widely used to estimate the current density distribution or the magnetic properties of superconducting material, and many measurement methods using Hall sensor have been reported In order to realize a highly functional measuring system with real time and high spatial resolution, and to estimate properties of superconducting film with complex structure or pattern, it is very important to develop a novel Hall sensor array with small size, plane structure and two or three axis. Recently, the new LSI manufacture technology combining with bonding technology such as system on chip (SoC), system in package (SiP) has been developed Using this technology, the highly functional semiconductor devices with new structure, small size and low cost can be realized Therefore, we developed a two-axis Hall sensor array using epitaxial liftoff (ELO) film bonding technology. The Hall sensor array was fabricated on the Si substrate with plane structure and ran measure directly axial and radial magnetic field components. And we have been developing the magnetic field measurement and visualization system with Hall sensor probes to study the critical current density distribution or magnetic properties of high temperature superconducting films.

霍尔传感器是一种非常方便的磁传感器，可以无损、非接触地测量电流密度。它被广泛用于测量超导材料的电流密度分布或磁性能，已有许多基于霍尔传感器的测量方法被报道，为了实现高功能的实时、高空间分辨率的测量系统，以及对具有复杂结构或图案的超导薄膜的性能估计，开发一种小尺寸、平面结构的新型霍尔传感器阵列具有非常重要的意义。近年来，片上系统(SoC)、系统在封装(SiP)等键合技术与大规模集成电路制造技术相结合的新技术应运而生，可以实现结构新颖、体积小、成本低的高功能半导体器件。为此，我们利用外延剥离(ELO)薄膜键合技术研制了两轴霍尔传感器阵列。霍尔传感器阵列是在具有平面结构的硅衬底上制作的，可以直接测量轴向和径向磁场分量。为了研究高温超导薄膜的临界电流密度分布或磁性质，我们一直在开发霍尔传感器探头磁场测量和可视化系统。