An application of low energy stom scattering spectrosoopy for insulator surface atomic structure analysis

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We have been developing a low energy atom scattering system combined with a time-of-flight spectrometer for insulator surface structural analysis. Insulator surface structure is difficult to study because of charging effects during electron or ion beam bombardment. Structural analyses of insulator surfaces are very important in fundamental research as well as technology fields. In our system, charged ion beams of .2 keV-Ne^+ are converted into neutral beams by charge exchange with the same element gas after the primary beam passes through a chopper. Other features of this system are pulsed beams, time-of-flight measurements, and a micochannel plate (MCP) detector is mounted along the primary beam. This is a home made equipment. All electric circuits were designed and developed by scientists who are familiar with engineering.