Development of compact size force sensing devices which uses for high directivity elasticity beam

本研究的目的是设计并研制一种小型六维力传感器及微力传感装置，采用狭缝式梁结构。本研究的主要结果如下：1.我们在以前的工作中提出了H狭缝型平行光束结构。该传感器结构可以单独实现过载防止而不需要任何其他部件，并且可以作为过载防止机构嵌入该结构中。然而，为了防止疲劳破坏，当用于陶瓷时，切口中应力分布的平坦度对于狭缝型梁是重要的。1)确定切口梁的最佳切口形状。结果表明，短轴与长轴比为1/5 ~ 1/6的椭圆形切口具有较好的抗扭刚度。2)为了防止H型切口梁的疲劳破坏，切口处应力分布的平坦性和最大应力处的曲率是很重要的。关于这一点，短轴与长轴之比为1/5的椭圆显示出良好的效果。3)在椭圆轮廓的情况下，产生的应变略大于矩形轮廓。4)通过正确的计算，可以在设计阶段建立起防过载作用点。然而，凹口处的旋转中心是重要的。与矩形曲线相比，椭圆曲线的旋转中心更多地位于缺口中心附近。5)该H型狭缝梁将应用于显微剪刀型触觉装置，以在显微镜下观察的脑外科手术中传达切割的感觉。对Stewart平台式结构模型进行了有限元分析，并制作了小型六维力传感器样机。然而，由于难以从波束产生的信号中去除串扰的干扰，这仍然是一个遥不可及的目标.研究成果已在国内外学术会议上发表，并在期刊上发表。

The objective of this study is to design and develop a small 6-axis force sensor and micro force-sensing device, using the slit type beam structure. The results of this research are summarized as follows.1. We proposed H-slit type parallel beam structure in our previous work. This sensor structure alone can be realized for overload prevention without any other parts and can be embedded as overload prevention mechanism in the structure. However, to care for fatigue failure, flatness of the stress distribution in the notch is important for a slit type beam when using it for ceramics. 1) To determine the optimum notch shape for a notched beam. The results showed that an elliptical notch with a minor-axis-to-major-axis ratio of 1/5 to 1/6 gave relatively good performance for torsional rigidity. 2) To prevent the fatigue failure on the H-slit beam, flatness of the stress distribution and the curvature of maximum stress part in the notch are important. About this, the ellipse of minor axis and major axis ratio 1/5 showed good result. 3) In case of the elliptical profiles, generated strains are slightly larger than the rectangle profiles. 4) The acting point of overload prevention can be built up at the design stages by calculation correctly. However, the rotational center at the notch is important. The ellipsoid curves rotational center is placed more in vicinity of notch center as compared to the rectangular curves. 5) This H-slit beam is to be applied to the micro-scissors type haptic device to convey feeling of cutting in brain surgery seen under microscope.2. It was analyzed for Stewart Platform type structure model using FEA and to fabricate prototype model small 6-axis force sensor. However, it yet remains out of reach of the goal, because of difficulty in cutting out of the interference of cross talk from the beams generated signals.3. The result of research has been presented in the domestic and international conferences and has also been reported to the journals.