Development of compact size force sensing devices which uses for high directivity elasticity beam

本研究的目的是设计和开发一种小型六轴力传感器和微型力传感装置，采用狭缝式梁结构。本文的研究结果总结如下：1。我们在之前的工作中提出了h缝型平行梁结构。该传感器结构无需任何其他部件即可单独实现防过载，并可作为防过载机构嵌入结构中。然而，为了防止疲劳破坏，缝型梁在缺口处的应力分布的平整度对于缝型梁在陶瓷中的应用是很重要的。1)确定缺口梁的最佳缺口形状。结果表明，椭圆缺口的小轴长轴比为1/5 ~ 1/6时，具有较好的抗扭刚度。2)为了防止h缝梁的疲劳破坏，应力分布的平整度和缺口处最大应力部分的曲率是重要的。长、短轴比为1/5的椭圆效果较好。3)椭圆型型材产生的应变略大于矩形型材。4)通过正确的计算，可以在设计阶段确定防止过载的作用点。然而，切迹处的旋转中心是重要的。与矩形曲线相比，椭球曲线的旋转中心更靠近缺口中心。5)将这种h缝光束应用于微型剪刀型触觉装置，以传达显微镜下脑外科手术中切割的感觉。采用有限元分析方法对Stewart平台型结构模型进行了分析，并制作了小型六轴力传感器的原型模型。然而，由于难以从产生信号的波束中剔除串扰的干扰，这一目标仍然无法实现。研究成果已在国内外学术会议上发表，并在学术期刊上发表。

The objective of this study is to design and develop a small 6-axis force sensor and micro force-sensing device, using the slit type beam structure. The results of this research are summarized as follows.1. We proposed H-slit type parallel beam structure in our previous work. This sensor structure alone can be realized for overload prevention without any other parts and can be embedded as overload prevention mechanism in the structure. However, to care for fatigue failure, flatness of the stress distribution in the notch is important for a slit type beam when using it for ceramics. 1) To determine the optimum notch shape for a notched beam. The results showed that an elliptical notch with a minor-axis-to-major-axis ratio of 1/5 to 1/6 gave relatively good performance for torsional rigidity. 2) To prevent the fatigue failure on the H-slit beam, flatness of the stress distribution and the curvature of maximum stress part in the notch are important. About this, the ellipse of minor axis and major axis ratio 1/5 showed good result. 3) In case of the elliptical profiles, generated strains are slightly larger than the rectangle profiles. 4) The acting point of overload prevention can be built up at the design stages by calculation correctly. However, the rotational center at the notch is important. The ellipsoid curves rotational center is placed more in vicinity of notch center as compared to the rectangular curves. 5) This H-slit beam is to be applied to the micro-scissors type haptic device to convey feeling of cutting in brain surgery seen under microscope.2. It was analyzed for Stewart Platform type structure model using FEA and to fabricate prototype model small 6-axis force sensor. However, it yet remains out of reach of the goal, because of difficulty in cutting out of the interference of cross talk from the beams generated signals.3. The result of research has been presented in the domestic and international conferences and has also been reported to the journals.