Development of compact size force sensing devices which uses for high directivity elasticity beam

本研究的目的是设计和研制一种小型六维力传感器和微型力传感装置，采用狭缝式横梁结构。本研究的成果总结如下。我们在以前的工作中提出了H型狭缝型平行梁结构。这种传感器结构可以单独实现过载防止，而不需要任何其他部件，并且可以作为过载预防机构嵌入结构中。然而，为了防止疲劳破坏，对于用于陶瓷的狭缝梁来说，缺口应力分布的平坦性是很重要的。1)确定缺口梁的最佳缺口形状。结果表明，短轴与长轴比为1/5~1/6的椭圆缺口具有较好的扭转刚度性能。2)为了防止H型切缝梁的疲劳破坏，切槽的应力分布平坦度和最大应力部位的曲率是非常重要的。对于这一点，短轴和长轴比为1/5的椭圆显示效果较好。3)椭圆形截面产生的应变略大于矩形截面。4)通过正确的计算，可以在设计阶段确定防超载作用点。然而，切口处的旋转中心很重要。与矩形曲线相比，椭球曲线的旋转中心更多地位于缺口中心附近。5)将这种H-狭缝光束应用于微型剪刀式触觉装置，以传达在显微镜下看到的脑外科手术中的切割感。对Stewart平台式结构模型进行了有限元分析，并制作了原型小型六维力传感器。然而，它仍然遥不可及，因为很难从产生的光束信号中消除串扰的干扰。研究成果已在国内外会议上发表，并已在期刊上发表。

The objective of this study is to design and develop a small 6-axis force sensor and micro force-sensing device, using the slit type beam structure. The results of this research are summarized as follows.1. We proposed H-slit type parallel beam structure in our previous work. This sensor structure alone can be realized for overload prevention without any other parts and can be embedded as overload prevention mechanism in the structure. However, to care for fatigue failure, flatness of the stress distribution in the notch is important for a slit type beam when using it for ceramics. 1) To determine the optimum notch shape for a notched beam. The results showed that an elliptical notch with a minor-axis-to-major-axis ratio of 1/5 to 1/6 gave relatively good performance for torsional rigidity. 2) To prevent the fatigue failure on the H-slit beam, flatness of the stress distribution and the curvature of maximum stress part in the notch are important. About this, the ellipse of minor axis and major axis ratio 1/5 showed good result. 3) In case of the elliptical profiles, generated strains are slightly larger than the rectangle profiles. 4) The acting point of overload prevention can be built up at the design stages by calculation correctly. However, the rotational center at the notch is important. The ellipsoid curves rotational center is placed more in vicinity of notch center as compared to the rectangular curves. 5) This H-slit beam is to be applied to the micro-scissors type haptic device to convey feeling of cutting in brain surgery seen under microscope.2. It was analyzed for Stewart Platform type structure model using FEA and to fabricate prototype model small 6-axis force sensor. However, it yet remains out of reach of the goal, because of difficulty in cutting out of the interference of cross talk from the beams generated signals.3. The result of research has been presented in the domestic and international conferences and has also been reported to the journals.