Development of continuous flowing high density plasma source in the atmospheric pressure?

点击翻译按钮获取中文摘要

The micro hollow cathode discharge (MHCD) is a promising one to generate a atmospheric pressure glow plasma. And, to produce 3-dimensional large volume and atmospheric pressure glow plasma, parallel operations of the micro-cathode sustained (MCS) discharge is required. In this study, we demonstrated parallel MCS discharges in flat plate and cylindrical geometries, as follow,1: Demonstration of stable parallel MHCD Comparing current-voltage characteristics of MHCD of several dielectric materials (mica, Teflon, FR-4), MHCD electrode using FR-4 has a long lifetime and wide discharge current range over 100mA.2: Resolving operating conditions of parallel MCS discharge Injecting large amount of plasma from MHCD electrodes to MCS discharge region, the break down and the sustaining voltages of MCS discharge is demonstrated to be controlled by the current value of MHCD. And using these conditions, parallel MCS discharges of flat plate electrodes, furthermore cylindrical shaped electrode which suites well for the continuous gas treatment applications.