MEMS Shutter Array for Astronomical Infrared Spectrograph of Deep Galaxies

用于深星系天文红外光谱仪的 MEMS 快门阵列

• 批准号: 18340053
• 负责人: TOSHIYOSHI Hiroshi
• 金额: $ 3.81万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2006
• 资助国家: 日本
• 起止时间: 2006 至 2007
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18340053/
• 关键词: Micromachine; Electrical Machinery; Astronomy; Cosmoohysics; Theoretical Astronomy

Astronomical multi-object spectrographs (MOSs) are becoming a powerful tool for the deep survey of the galaxies. Millions of galaxies can be found in a small fraction of view angle when one looks into the deep space over billions of light years. Knowing the distance to each galaxy by the near-infrared Doppler shift is the first step to understand the process of galaxy formation at the beginning of the universe. However, the number of photons is limited after their having traveled a long distance and it usually takes long time to have a clear wavelength spectrum from one galaxy. For this reason, the MOS system has been employed to make best use of the observatory time by observing several target galaxies at a time. We have developed an electrically driven micro-shutter array for an astronomical telescope with an infrared spectroscopy for multiple celestial objects. The shutter array was made by the SOI silicon micromachining with deep reactive-ion etching. The shutter array consists of 1 x 7 elements of 100 microns by 1000 microns shutter plate supported by a pair of thin silicon beams of only 1 micron wide, 2 microns thick, and 450 microns long. Typical drive voltage to open the shutter from the zero flat position to 90 degrees was 100 V - 200 V, depending on the suspension dimensions. In this paper, we report two types of shutters after improving the operation reliability; the shutters are independently addressed and electrically latched with relatively low hold voltage of 27 V.

天文多目标光谱仪(MOSS)正成为深入研究星系的有力工具。当人们在数十亿光年的深空中观察时，可以在一小部分视角下发现数百万个星系。通过近红外多普勒频移知道每个星系的距离，是了解宇宙开始时星系形成过程的第一步。然而，经过长距离传播后，光子的数量是有限的，而且通常需要很长时间才能从一个星系获得清晰的波长光谱。为此，MOS系统被用来充分利用观测时间，一次观测几个目标星系。我们开发了一种用于天文望远镜的电驱动微快门阵列，该阵列具有多天体的红外光谱。快门阵列由SOI硅深反应离子刻蚀微机械加工而成。快门阵列由1×7个100微米×1000微米的快门板组成，由一对仅宽1微米、厚2微米、长450微米的薄硅梁支撑。根据悬挂尺寸的不同，从零平面位置到90度打开快门的典型驱动电压为100V-200V。在本文中，我们报道了两种提高工作可靠性的快门：独立寻址和电锁定，保持电压相对较低，为27V。

项目成果

惑星探査機搭載用LIDARの2次元走査機構に関する研究

行星探测器激光雷达二维扫描机构研究

• 发表时间: 2006
• 期刊: 電気学会E部門誌 126
• 作者: 高原卓也;三田 信;武山芸英;浜田裕介;高橋巧也;年吉 洋;水野貴秀
• 通讯作者: 水野貴秀

"Electrostatic Actuation" contributed to "Comprehensive Microsystems" vol.2, pp.1-38, Editor: Y.B. Gianchandani, O. Tabata, H. Zappe (寄稿)

《静电驱动》撰稿于《综合微系统》第 2 卷，第 1-38 页，编辑：Y.B. Gianchandani、O. Tabata、H. Zappe（供稿）

• 发表时间: 2007
• 作者: T. Takahashi;M. Mita;K. Motohara;N. Kobayashi;N. Kashikawa;H. Fujita;H. Toshiyoshi;H. Toshiyoshi
• 通讯作者: H. Toshiyoshi

Study of 2D Scanning LIDAR Optics for Planetary Explorer

行星探测器二维扫描激光雷达光学器件研究

• 发表时间: 2006
• 期刊: IEEJ Trans. Sensors and Micromachines vol.126-E
• 作者: T. Takahara;M. Mita;N. Takeyama;Y. Hamada;T. Takahashi;H. Toshyoshi;T. Mizuno
• 通讯作者: T. Mizuno

2次元走査型LIDAR用MEMSスキャナ

用于 2D 扫描激光雷达的 MEMS 扫描仪

• 发表时间: 2007
• 作者: 三田 信;水野貴秀;年吉 洋;藤田博之
• 通讯作者: 藤田博之

Electrostatically Addressable Gatefold Micro-shutter Arrays for Astronomical Infrared Spectrograph

用于天文红外光谱仪的静电可寻址折叠式微快门阵列

• 发表时间: 2006
• 期刊: Proc.Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2006),June 25-28,2006,Marina-Mandarin Hotel,Singapore.
• 作者: T.Takahashi;M.Mita;K.Motohara;N.Kobayashi;N.Kashikawa;H.Fujita;H.Toshiyoshi
• 通讯作者: H.Toshiyoshi