Three-dimensional elemental mapping by using spatially-resolved glow discharge optical emission spectrometry

使用空间分辨辉光放电发射光谱法进行三维元素映射

• 批准号: 18360016
• 负责人: WAGATSUMA Kazuaki
• 金额: $ 8.85万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2006
• 资助国家: 日本
• 起止时间: 2006 至 2007
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18360016/
• 关键词: surface; interface characteristics; emission spectrometry; glow discharge plasma; elemental identification; quality control; 組成分析

An imaging spectrometer system was employed to measure two-dimensional emission images from a glow discharge plasma in atomic emission spectrometry. Emission signals from a glow discharge lamp having a hollow anode of 8 mm in diameter were conducted through a collimator optics onto the entrance slit of an imaging spectrograph (Model 12580, BunkoKeiki Corp.), and the emission image was then dispersed and detected on a CCD detector (SensiCam QE Model, PCO Imaging Corp.). The emission images at Zn I 334.50 nm for a zinc sample and at Cu I 324.75 nm for a copper sample could be obtained. Their emission intensities were not uniform in the radial direction of the plasma region but became weaker at larger distance from the central zone. The two-dimensional distribution would result from a spatial variation in the excitation efficiency of the plasma. Temporal variations in the emission images were also observed when a zinc-coated steel plate and a thermally-deposited copper film were employed as the sample. Depth profiles of these surface layers estimated from the corresponding images indicated that a spatially-resolved measurement could provide the data with good precision.

采用成像光谱仪系统从原子发射光谱中的发光放电等离子体中测量二维发射图像。通过直径为8毫米的空心阳极的发射信号通过直接仪的空心阳极进行直径为8毫米，然后在成像光谱仪的入口缝隙（型号12580，Bunkokeiki Corp.）上进行，然后在CCD检测器（Sensicam QE QE Model，PCO，PCO Imaging Corp。）上分散并检测到发射图像。对于锌样品，Zn I 334.50 nm处的发射图像可以获得铜样品的Cu I 324.75 nm。它们的发射强度在血浆区域的径向方向上并不统一，而是在距中央区域较大距离的情况下变得较弱。二维分布将是由于血浆激发效率的空间变化而产生的。当使用锌涂层钢板和热沉积的铜膜作为样品时，还观察到发射图像的时间变化。从相应图像估算的这些表面层的深度曲线表明，空间分辨的测量可以很好地为数据提供精确的精度。

项目成果

続入門鉄鋼分析技術

继续介绍钢材分析技术

• 发表时间: 2007
• 作者: 高橋琢二;瀧原昌輝;我妻 和明
• 通讯作者: 我妻 和明

Depth profile analysis of thin film by using glow discharge optical emission spectrometry (GD-OES)

使用辉光放电发射光谱法 (GD-OES) 进行薄膜深度剖面分析

• 发表时间: 2007
• 作者: H. Park;K. Wagatsuma and S. C. Lee
• 通讯作者: K. Wagatsuma and S. C. Lee

第5版実験化学講座20-1 分析化学

第5版实验化学课程20-1分析化学

• 发表时间: 2006
• 作者: M. Takihara;T. Takahashi;我妻 和明
• 通讯作者: 我妻 和明

Excitation behavior of iron atomic lines having, various excitation energies emitted from glow discharge plasmas using argon, neon, and argon-helium gases

使用氩气、氖气和氩氦气从辉光放电等离子体发射的具有各种激发能量的铁原子线的激发行为

• 发表时间: 2007
• 作者: T. Hirahara;T. Nagao;I. Matsuda;G. Bihlmayer;E. V.Chulkov;Yu.M.Koroteev;S.Hasegawa;K. Wagatsuma
• 通讯作者: K. Wagatsuma

Emission and sputtering characteristics of Ne-Ar mixed gas glow discharge plasmas

Ne-Ar混合气体辉光放电等离子体的发射和溅射特性

• 发表时间: 2007
• 期刊: Analytical Sciences 23
• 作者: H. Park;M. Tsukiji;K. Wagatsuma;S. C. Lee
• 通讯作者: S. C. Lee