Three-dimensional elemental mapping by using spatially-resolved glow discharge optical emission spectrometry

使用空间分辨辉光放电发射光谱法进行三维元素映射

• 批准号: 18360016
• 负责人: WAGATSUMA Kazuaki
• 金额: $ 8.85万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2006
• 资助国家: 日本
• 起止时间: 2006 至 2007
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18360016/
• 关键词: surface; interface characteristics; emission spectrometry; glow discharge plasma; elemental identification; quality control; 組成分析

An imaging spectrometer system was employed to measure two-dimensional emission images from a glow discharge plasma in atomic emission spectrometry. Emission signals from a glow discharge lamp having a hollow anode of 8 mm in diameter were conducted through a collimator optics onto the entrance slit of an imaging spectrograph (Model 12580, BunkoKeiki Corp.), and the emission image was then dispersed and detected on a CCD detector (SensiCam QE Model, PCO Imaging Corp.). The emission images at Zn I 334.50 nm for a zinc sample and at Cu I 324.75 nm for a copper sample could be obtained. Their emission intensities were not uniform in the radial direction of the plasma region but became weaker at larger distance from the central zone. The two-dimensional distribution would result from a spatial variation in the excitation efficiency of the plasma. Temporal variations in the emission images were also observed when a zinc-coated steel plate and a thermally-deposited copper film were employed as the sample. Depth profiles of these surface layers estimated from the corresponding images indicated that a spatially-resolved measurement could provide the data with good precision.

利用原子发射光谱成像光谱仪系统测量了辉光放电等离子体的二维发射图像。来自具有直径为8mm的中空阳极的辉光放电灯的发射信号通过准直器光学器件传导到成像光谱仪（Model 12580，BunkoKeiki Corp.）的入口狭缝上，然后将发射图像分散并在CCD检测器（SensiCam QE Model，PCO Imaging Corp.）上检测。可以获得锌样品在Zn I 334.50 nm处的发射图像和铜样品在Cu I 324.75 nm处的发射图像。它们的发射强度在等离子体区域的径向方向上是不均匀的，但在离中心区较远的地方变得较弱。二维分布将由等离子体的激发效率的空间变化引起。当采用镀锌钢板和热沉积铜膜作为样品时，还观察到发射图像的时间变化。从相应的图像估计的这些表面层的深度剖面表明，空间分辨的测量可以提供具有良好精度的数据。

项目成果

Depth profile analysis of thin film by using glow discharge optical emission spectrometry (GD-OES)

使用辉光放电发射光谱法 (GD-OES) 进行薄膜深度剖面分析

• 发表时间: 2007
• 作者: H. Park;K. Wagatsuma and S. C. Lee
• 通讯作者: K. Wagatsuma and S. C. Lee

続入門鉄鋼分析技術

继续介绍钢材分析技术

• 发表时间: 2007
• 作者: 高橋琢二;瀧原昌輝;我妻 和明
• 通讯作者: 我妻 和明

Emission and sputtering characteristics of Ne-Ar mixed gas glow discharge plasmas

Ne-Ar混合气体辉光放电等离子体的发射和溅射特性

• 发表时间: 2007
• 期刊: Analytical Sciences 23
• 作者: H. Park;M. Tsukiji;K. Wagatsuma;S. C. Lee
• 通讯作者: S. C. Lee

Comparative investigation on the excitation of copper emission lines between argon and helium spark discharge plasmas

氩、氦火花放电等离子体铜发射线激发对比研究

• 发表时间: 2006
• 期刊: Spectroscopy Letters 39
• 作者: S.Nakamura;K.Wagatsuma
• 通讯作者: K.Wagatsuma

Emission characteristics of nickel ionic lines excited by reduced-pressure laser-induced plasmas

减压激光诱导等离子体激发镍离子线的发射特性

• 发表时间: 2007
• 作者: K. Wagatsuma;S. Nakamura
• 通讯作者: S. Nakamura