Development of high precision nano-particle jet deposition device and studies on deposition dynamics

In this study, accelerated ceramics particle，whose diameter is between several ten and several hundreds nano-meter orderThis film creation method is called This film creation method is called This film creation method is called This film creation method is callednano-particle jet deposition (PJD). gas-particle flow adjacent to the workpiece is measured by thePIV and deposition dynamics is estimated utilizing the FEM and MD simulation. Conclusions of this研究是follow. Flow rate of particle sprayed by the PJD device can be controlled between200~310m/s. In the case the flow rate is 200~275m/s, alumina particles (diameter：μm) remove the soda glass.·It is found that there is transition condition from deposition toremoval. And each size of particle has the different transition condition. When the particles hitthe workpiece,particles are fractured. MD simulation indicate that the optimum flow rate is 205~275m/s。

In this study, accelerated ceramics particle, whose diameter is between several ten and several hundreds nano-meter order, is sprayed to the workpiece on purpose to create film. This film creation method is called nano-particle jet deposition (PJD). gas-particle flow adjacent to the workpiece is measured by the PIV and deposition dynamics is estimated utilizing the FEM and MD simulation. Conclusions of this research is as follow.・Flow rate of particle sprayed by the PJD device can be controlled between 200~310m/s. In the case the flow rate is 200~275m/s, alumina particles (diameter: 2μm) remove the soda glass.・It is found that there is transition condition from deposition to removal. And each size of particle has the different transition condition.・When the particles hit the workpiece, particles are fractured.・MD simulation indicate that the optimum flow rate is 205~275m/s.