Development of high precision nano-particle jet deposition device and studies on deposition dynamics

在这个研究中，加速陶瓷粒子，哪个直径在多个十个和多个十个纳米表顺序之间，都被分散到了工作片上的目的来创建薄膜。这种电影创建方法被称为纳米粒子喷射沉积（PJD）。气体-粒子流动对工件的不利影响是通过PIV和沉积动力学估计的，可以利用FEM和MD模拟。这项研究的结论将继续下去。PJD设备散布的粒子速率可以控制在200 - 310米/秒之间。在流速为200 - 275米/秒的情况下，取下氧化铝颗粒（直径： 2微米）的苏打水。我们已经找到了，因为它是从沉积到搬迁的过渡条件。每个大小的粒子都有不同的过渡状态。当粒子击中工件时，粒子就会破碎。MD模拟指标，其最佳流量速率为205 - 275米/秒。

In this study, accelerated ceramics particle, whose diameter is between several ten and several hundreds nano-meter order, is sprayed to the workpiece on purpose to create film. This film creation method is called nano-particle jet deposition (PJD). gas-particle flow adjacent to the workpiece is measured by the PIV and deposition dynamics is estimated utilizing the FEM and MD simulation. Conclusions of this research is as follow.・Flow rate of particle sprayed by the PJD device can be controlled between 200~310m/s. In the case the flow rate is 200~275m/s, alumina particles (diameter: 2μm) remove the soda glass.・It is found that there is transition condition from deposition to removal. And each size of particle has the different transition condition.・When the particles hit the workpiece, particles are fractured.・MD simulation indicate that the optimum flow rate is 205~275m/s.