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DEVELOPMENT AND EVALUATION OF PRECISION ABRASIVE JET MACHINING DEVICE

精密磨料喷射加工装置的研制与评价

基本信息

批准号：
09555035
负责人：
KURIYAGAWA Tsunemoto
金额：
$ 7.17万
依托单位：
TOHOKU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1998
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09555035/
关键词：
ABRASIVE JET MACHINING BLASTING POWDER SUPPLY SCHL IEREN METHOD FINE NOZZLE CERAMICS ETCHING PATTERNING AJM 粉体搬送装置シュリーレンノズル固気2相流

项目摘要

A new device of abrasive jet machining (MM) has been developed for precise etching and patterning of hard and brittle materials such as ceramics, glass and silicon. AJM process is similar to the sand blasting, and effectively removes hard and brittle materials. AIM uses fine abrasive powders and small nozzles whose inner diameter (ID) is below 1mm. As the abrasive jet stream from the nozzle is focused onto the workpiece, small holes or slots can be machined easily. As a conventional AIM device, however, can not control the amount of injecting abrasives precisely, it is difficult to apply to a precision machining. In machining small holes, furthermore, impacting abrasives are accumulated at the bottom of the hole, and prevent the direct impact onto the workpiece. As a result, machining efficiency decreases with the progress of machining. To solve these problems, we developed a new AIM device which is capable of intermittent injection of abrasives. Abrasive grains are supplied intermittently by the cycle of 10 ms using high speed solenoid valves, mixed with continuous stream of high pressure carrier gas, and finally blasted from the nozzle. The device can blast a small amount of abrasives (about 0.5 mg/one cycle). Grain density in the jet stream from the nozzle can be controlled by changing signal frequency for the solenoid valves, When the valve is off, there is no abrasives in the jet stream and the accumulated abrasives are blown off. In this report, machining characteristics of the new AJM device are investigated, and direct etching and patterning of glass without mask are demonstrated.

研制了一种用于陶瓷、玻璃、硅等硬脆材料精密刻蚀和图形化的磨料射流加工装置。AJM工艺类似于喷砂，能有效去除硬脆材料。AIM使用细磨料粉末和内径（ID）小于1 mm的小喷嘴。当喷嘴喷出的磨料射流聚焦在工件上时，可以很容易地加工小孔或槽。然而，由于传统的AIM装置不能精确地控制喷射磨料的量，因此难以应用于精密加工。此外，在加工小孔时，冲击磨料积聚在孔的底部，并防止直接冲击工件。结果，加工效率随着加工的进行而降低。为了解决这些问题，我们开发了一种新的AIM设备，它能够间歇喷射磨料。使用高速电磁阀以10 ms的周期间歇地供应磨粒，与连续的高压载气流混合，最后从喷嘴喷射。该装置可以喷射少量磨料（约0.5 mg/一个循环）。通过改变电磁阀的信号频率可以控制喷嘴喷射流中的颗粒密度。当电磁阀关闭时，喷射流中没有磨料，积聚的磨料被吹走。在这份报告中，新的AJM设备的加工特性进行了研究，并直接蚀刻和图形化的玻璃无掩模演示。