Development of high-performance tribological coatings by means of plasma-based ion implantation and deposition process

采用等离子体基离子注入技术(PBII)制备了不同元素的含氟和含硫类金刚石纳米复合薄膜。本研究的目的是比较元素含量对薄膜沉积和摩擦学性能的影响，特别是比较高真空环境下薄膜的摩擦系数和耐磨性。结果表明，在真空度为10^~(-5)~(-5)·帕的条件下，S-类金刚石薄膜的摩擦学性能有较大改善，摩擦系数为0.03。

Plasma-based ion implantation (PBII) was utilized to prepare different elements including fluorine and sulfur-added DLC nano-composite films. The aim of this study was to compare the effects of element contents on the deposition and tribological properties of the films, especially to compare the friction coefficient and friction endurance, under a high vacuum environment. It was observed that S-DLC film demonstrates a considerable improvement in the tribological properties with the friction coefficient of 0.03 under a vacuum of 10^<-5>Pa.