DevelopmentofHeat-Resistant Hard CarbonFilmsUtilizedFor Tribological Usages

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In this study , the silicon- and oxygen- doped, and the silicon- andnitrogen- doped diamond-like carbon (Si-O-DLC and Si-N-DLC) films are chosen to takeinto account the thermal stability and Tribological performance compared with pure DLC.The results indicate that Si-N-DLC films present the better thermal stability due to thepresence of Si-O network in the films. Furthermore, Si-O-DLC and Si-N-DLC films exhibitthe excellent Tribological performance. It can be concluded that Si-O-DLC and Si-N-DLCfilms can improve the thermal stability and Tribological performance.