Study on Application of Cubic Boron Nitride Films

由于立方氮化硼（c-BN）具有化学惰性和热惰性，其硬度仅次于金刚石，因此许多研究人员认为，c-BN薄膜为易损件、刀具刀片、旋转工具和模具提供了巨大的机会。本文研究了磁增强等离子体离子镀法制备的c-BN薄膜在机械方面的应用，特别是摩擦学方面的应用。所得结果总结如下：(1)离子注入后处理提高了c-BN膜的附着力。改进后的c-BN膜的附着力比沉积后的c-BN膜提高了约4倍。(2)实验制备了c- bn涂层刀具。实验证明，c-BN薄膜的高硬度和低摩擦性能是其切削力小的主要原因。(3)成功地形成了多层c-BN/TiN，延长了c-BN膜的摩擦学耐久寿命。多层膜的总厚度约为2.0微米。(4)为了进一步明确c-BN膜的摩擦学性能，研究了c-BN膜在不同环境下的摩擦学性能。在真空、高湿和水环境下获得了低摩擦特性。(5) c-BN膜对钛合金的摩擦性能较低。(6)将c-BN薄膜成功地涂覆在原子力显微镜所用芯片的极细衬底上。

Because cubic boron nitride (c-BN), which is chemically and thermally inert, is second only to diamond in hardness, many researchers believe that c-BN film offers great opportunities for wear parts, cutting tool inserts, rotary tools and dies. This study deals with some applications of c-BN films, which were synthesized by magnetically enhanced plasma ion plating, for mechanical usage, especially tribological application. The obtained results are summarized as follows :(1) The adhesion of c-BN film was improved by means of ion-implantation post-treatment. The adhesion value of improved c-BN film was about 4 times higher than that of as-deposited c-BN film.(2) The c-BN-coated cutting tool was fabricated experimentally. It was proved that high hardness and low-friction properties of the c-BN film contributed the cutting performances, such as low cutting forces.(3) Multi-layer of c-BN/TiN was successfully formed in order to elongate a tribological endurance life of c-BN film. Total thickness of the multi-layer was about 2.0 micro-meter.(4) To clarify the tribological property of c-BN film further, the properties were investigated in various environments. Low frictional characteristics were obtained in vacuum, high-humid and water environments.(5) Low frictional property of c-BN film was proved even against Ti-alloy.(6) The c-BN film was successfully coated on a very fine substrate which was a chip using for atomic force microscope.