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Study on Application of Cubic Boron Nitride Films

立方氮化硼薄膜的应用研究

基本信息

批准号：
09650169
负责人：
WATANABE Shuichi
金额：
$ 1.09万
依托单位：
Nippon Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1998
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09650169/
关键词：
Cubic Boron Nitride Film Thin Films Ion Plating Ion Implantation Tribology Multi-layers Protective Coatings Coated Tools 立方晶室化ホウ素

项目摘要

Because cubic boron nitride (c-BN), which is chemically and thermally inert, is second only to diamond in hardness, many researchers believe that c-BN film offers great opportunities for wear parts, cutting tool inserts, rotary tools and dies. This study deals with some applications of c-BN films, which were synthesized by magnetically enhanced plasma ion plating, for mechanical usage, especially tribological application. The obtained results are summarized as follows :(1) The adhesion of c-BN film was improved by means of ion-implantation post-treatment. The adhesion value of improved c-BN film was about 4 times higher than that of as-deposited c-BN film.(2) The c-BN-coated cutting tool was fabricated experimentally. It was proved that high hardness and low-friction properties of the c-BN film contributed the cutting performances, such as low cutting forces.(3) Multi-layer of c-BN/TiN was successfully formed in order to elongate a tribological endurance life of c-BN film. Total thickness of the multi-layer was about 2.0 micro-meter.(4) To clarify the tribological property of c-BN film further, the properties were investigated in various environments. Low frictional characteristics were obtained in vacuum, high-humid and water environments.(5) Low frictional property of c-BN film was proved even against Ti-alloy.(6) The c-BN film was successfully coated on a very fine substrate which was a chip using for atomic force microscope.

由于立方氮化硼（c-BN）具有化学和热惰性，硬度仅次于金刚石，许多研究人员认为c-BN薄膜为耐磨零件，切削刀具刀片，旋转刀具和模具提供了很大的机会。本研究主要探讨磁增强等离子体离子镀技术制备的立方氮化硼薄膜在机械，特别是摩擦学方面的应用。主要研究结果如下：（1）离子注入后处理提高了c-BN薄膜的附着力。改进后的c-BN膜的附着力比沉积态的c-BN膜提高了约4倍。(2)实验制备了c-BN涂层刀具。结果表明，c-BN薄膜的高硬度和低摩擦特性有助于降低切削力等切削性能。(3)为了提高c-BN薄膜的摩擦学寿命，成功地制备了c-BN/TiN多层膜。多层的总厚度为约2.0微米。(4)为了进一步阐明c-BN薄膜的摩擦学性能，研究了其在不同环境下的摩擦学性能。在真空、高湿和水环境中获得了低摩擦特性。(5)c-BN薄膜与钛合金的摩擦性能较低。(6)成功地在原子力显微镜用芯片基片上制备了c-BN薄膜。