Research and Development of Multi-Layered Sensor/Actuator Devices Utilizing Multi-Ferroic Effects

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An RF magnetron sputtering apparatus equipped with four separate confocal sources as well as with a heating and ion-irradiating system for substrates was developed to make the films crystalline. Without using the system, the films showed amorphous if the substrate temperature is below 400℃. However, crystallized film is obtained even at 200℃ of substrate temperature by ion-irradiating. Crystallized film deposited on a polyimide sheet shows two-way motion by thermal cycle. With the results mentioned above, multi-layered ferroics devices can be fabricated at low substrate temperature for variety of purposes in the near future.