Evaluation of Interfaces between Laminated Ferroic Materials, and Development of Multi-Functional Devices

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An RF magnetron sputtering apparatus equipped with separateconfocal sources as well as with a heating and ion-irradiating system for substrates wasdeveloped, and used to make the ferroic materials films crystalline. For example, thecrystallized TiNi alloy film is deposited even at 353 K of substrate temperature with usingthe system. Appropriate ion-irradiation is considered to be help to crystallize the film atlow substrate temperature. The crystallized TiNi alloy film deposited on a polyimide sheetwas cut into the shape of a double-beam cantilever and the ends of the two beams wereconnected to an electrical power supply. The cantilever shows a repeatable two-way motionby electrical cycle of 0.1 Hz at room temperature. A multiferroics laminate of ferromagneticshape memory alloy and lead zirconate titanate was also fabricated and observed itsmagnetoelectric effect. The laminated device was exhibited a good magnetoelectricsensitivity. Therefore, the laminated device which is a TiNi alloy film and a piezoelectricpolymer is also expected to be exhibited a good quality.