Cylinder rod surface coating using sputtering deposition method with modulated magnetic field

采用新型磁控溅射沉积方法在硬质合金钢质气缸杆上制备了钨、碳和钛薄膜，以防止其腐蚀和/或提高摩擦阻力。在沉积过程中，柱状杆阳极衬底和圆柱状管靶之间产生了等离子体。实验结果表明，在低频交变线圈电流调制磁场的作用下，等离子体密度分布向轴向移动。利用调制磁场提高了沉积速度和膜层的均匀性，提高了涂层的耐蚀性和耐磨性。

Tungsten, carbon and titanium thin films were prepared on the carbide steel cylinder rod using new magnetron sputtering deposition method to prevent their corrosion and/or increasing friction resistance. In the deposition, plasmas were generated between cylinder rod anode substrate and cylinder pipe targets. Experimental results suggest that plasma density distribution move to the axial direction using modulated magnetic field generated by low frequency alternating coil current. Deposition rate and film uniformity increased using modulated magnetic field, and corrosion resistance and friction resistance were increased by this hard coating.