Low Friction Properties of Si-Incorporated DLC Coatings Treated with Oxygen Plasma

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In this study, the effects of silicon oxide layer on frictional properties of Si-DLC coatings were investigated by controlling the amount of silicon oxide on Si-DLC coatings. The amount of silicon oxide on the Si-DLC coating was controlled by oxygen plasma treatment for 30-300 s. In a result, the amount of silicon oxide on the top surface of Si-DLC coating increases with the increasing treatment time of oxygen plasma. The friction coefficients of Si-DLC coatings with 3-7at.%Si decrease to 0.02 due to oxygen plasma treatment, which is the lower value than that of Si-DLC coating with 13at.%Si. The surface hardness of Si-DLC coatings is slightly reduced by oxygen plasma treatment due to formation of silicon oxide on the top surface, whereas the hardness of wear track exhibits the same value to Si-DLC coating before oxygen plasma treatment. The Si-rich oxide layer formed on the Si-DLC coating plays roll of scarifying layer to reduce friction coefficient. The oxygen plasma treatment is effective to reduce the friction coefficient without hardness reduction in the entire Si-DLC coating.