Improvement of interferometer with self-compensation of vibrations

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In order to improve the measurement resolution of a dispersion interferometer, which is free from mechanical vibrations, the phase modulation method using a ratio of modulation amplitudes is proposed and adopted. The enough power of the second harmonic can be generated with a nonlinear crystal AgGaSe_2, although the generation is usually difficult for a frequency-stabilized continuous-wave laser. The feasibility of the proposed method is demonstrated by the phase shift measurement of the ZnSe plate, which simulates a plasma. It is confirmed that the mechanical vibrations are cancelled optically and gives no phase errors.