Design method to control ground vibration and direct vibrations for micro-nano machine tools

微纳切削磨床需要精确的刀具运动，而微振动是其中一个非常重要的问题。振动分为来自地面的间接扰动和来自机械执行机构的直接扰动。在本研究中，建立了楼板、防振装置和机器的动力学模型。利用该模型对刀具与工件之间的相对振动进行了分析，并提出了减振设计/控制方法。

Accurate tool motion is required for the micro-nano cutting and grinding machines, and micro-vibration is one of very important issues. Vibrations are categorized in the in-direct disturbance from the ground and direct disturbance from the machine actuators. In this research, the dynamic model of the floor, anti-vibration devices, and the machine is developed. By using this model, the relative vibration between the tool and workpiece is analyzed and anti-vibration design/control method is proposed.