Research on the high-precision machine tools integrated with a measurement artifact and control model

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In this research, a systematic method to model and compensate geometric errors of machine tools is developed. In order to separate geometric errors from other errors, the developed machine tool has a flat artifact and a control model are introduced. The obtained results are as follows :(1) AZ-axis, which has high response and high resolution, is built in the developed machine tool Designing high response servo system, response of the Z-axis is improved to be 100Hz.(2) By using an integrated flat artifact and a laser displacement sensor, straightness of motion is measured and modeled by using the Fourier analysis.(3) A flat surface machining with nonrotational cutting tools was tested to validate our method. On the plane of 45mm 70 mm, the fluctuation of the relative displacement was reduced from 1.3 to 0.5 μm P-V. Machining experiments with a single-crystal diamond tool were also carried out and the straightness of the profile curve was reduced from 1.0 to 0.4 μ m.