Development of safe and reliable sensor/actuator device made from multiferroics materials

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We developed an RF magnetron sputtering system equipped with separate sources as well as with a heating and ion-irradiation system for substrates. The ion irradiation system is basically similar to PBII & D(plasma based ion implantation and deposition) system which was applied to surface modification of plastic bottle, ion implantation for polymeric materials, deposition of a diamond-like carbon film, and so on. The hardness and fexlibility of the DLC formed by the developed system can be widely changed by adequately selecting RF power, pulse bias voltage, gas species and gas pressure.