Formation of lower order cluster molecules by a precise control of low energy electron plasma

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For a precise control of low electron energy plasma, gas stream-type plasma was newly developed, and the formation process of low order clusters, which proceeded continuously in plasma, was measured in detail. Formation mechanism of nanoparticles and nanorods through the reaction among the metal oxide clusters were clarified. Moreover, the initial process of the carbon polymerization reaction was investigated. The role of the oxygen, which disturbed polymerization reaction, was also clarified. Formation mechanism of nanoparticles through low order cluster molecules was elucidated.