Creation of next-generation nanocomposite films by establishment of differential pumping co-deposition technique

新开发的差分泵浦共溅射系统（DPCS），以便于控制，但灵活的多功能纳米复合薄膜的组成不受热力学限制的制造。在硬质涂层方面，采用DPCS制备了由氮化物（CrAlN或AlN）和氧化物（Al_2O_3和SiO_2）组成的新型纳米复合薄膜。在此基础上，采用常规溅射方法制备了CrAlN/BN复合薄膜，并在空气中退火得到了CrAlN/Al 2 O3纳米复合薄膜。在功能薄膜方面，采用DPCS溅射沉积，成功地获得了多层CeO_2/Al薄膜，且没有铝的氧化

A differential pumping co-sputtering system(DPCS) was newly developed to facilitate a controlled, but flexible fabrication of multifunctional nanocomposite films with compositions not limited by thermodynamic restrictions. As for the hard coatings, new nanocomoposite films consisting of nitride(CrAlN or AlN) and oxide(Al_2O_3 and SiO_2) were prepared using DPCS. Furthermore, a new nanocomposite films consisting of CrAlN and alumina was obtained from CrAlN/BN films, which was prepared with conventional sputtering apparatus, by annealing in air. On the other hand, as for the functional film, multi layered CeO_2/Al films were successfully obtained without aluminum oxidation during sputtering deposition with DPCS