Electrochemical tailoring of semiconductor nanowire arrays and their application to photo-energy devices

研究了离子液体电解质电沉积硅薄膜的新工艺，并利用EQCM、TEM和拉曼光谱对沉积过程的初始阶段进行了研究。结果表明，在薄膜中加入一定量的离子液体的同时，电沉积了非晶态硅。此外，利用紫外纳米压印技术制备了直径为150 nm的硅纳米点阵列，成功地电沉积了均匀排列的硅纳米点。

Novel process for the electrodeposition of Si thin film from ionic liquid electrolyte has been developed and the initial stage of the deposition process was investigated using EQCM, TEM, and Raman Spectroscopy. It was found that amorphous Si was electrodeposited while a certain amount of ionic liquid was included in the films. Moreover, uniform array of Si nanodots was successfully electrodeposited using 150 nm diameter dot array patterns fabricated by UV nanoimprinting lithography.