Development of a single molecule sensing device with nanogap electrodes formed of few-layer graphene

我们制作了石墨烯基纳米间隙电极，并研究了石墨烯和金属电极之间的接触电阻，以实现单分子传感器件。因此，我们建立了纳米间隙的制造过程中，利用电击穿的方法在几层石墨烯。此外，我们研究了接触电阻，利用传输线的方法。结果表明，制备工艺和过程对石墨烯的低电阻欧姆接触的发展至关重要。这些发现预计将有助于石墨烯基纳米电子器件的发展。

We fabricated graphene-based nanogap electrodes and investigated a contact resistance between graphene and metallic electrodes for the realization of a single molecule sensing device. As a result, we established the nanogap-fabrication process in few-layer graphene by utilizing an electrical breakdown method. In addition, we investigated the contact resistance by utilizing a transmission line method. The results indicated that the fabrication process and procedure were very important for developing the low resistance ohmic contact to the graphene. These findings are expected to contribute to progress in the development of graphene-based nanoelectronic devices.