Development of a single molecule sensing device with nanogap electrodes formed of few-layer graphene

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We fabricated graphene-based nanogap electrodes and investigated a contact resistance between graphene and metallic electrodes for the realization of a single molecule sensing device. As a result, we established the nanogap-fabrication process in few-layer graphene by utilizing an electrical breakdown method. In addition, we investigated the contact resistance by utilizing a transmission line method. The results indicated that the fabrication process and procedure were very important for developing the low resistance ohmic contact to the graphene. These findings are expected to contribute to progress in the development of graphene-based nanoelectronic devices.