The method based on QCD-model for planning and controlling a multi-chamber tool and a production network

在本研究中，我研究了在半导体制造系统中，为了最大化纳米级生产的高质量产品的生产能力，计划和控制生产工具或生产线的方法。应用带阻塞排队模型和约束理论，提出了多腔刀具制造控制的优化方法，并将其应用于实际工厂的管理中。并提出了一种同时实现零返工、提高产品良品率、提高产品组合生产中工具利用率的管理方法。将该方法应用于实际的半导体工厂，可使整体设备效能提高1.4倍以上。

in this research, I studied the method of planning and controlling production tools or a factory line for maximizing the throughput of quality products for nano-scale production in semiconductor manufacturing system. The optimal method of the manufacturing control inside a multi-chamber tool was proposed by applying queuing model with blocking and TOC (Theory of constraints), and it was applied to management at a real factory. Moreover, I created a management method which achieves simultaneously zero-rework, improvement in the throughput of quality products, the improvement in a tool utilization in product-mix production. As the result to apply the method to an actual semiconductor factory, overall equipment effectiveness(OEE) can be improved to 1.4 or more times.