Development of ultrasonic atomic force microscopy for nondestructive evaluation of thin films

对亚微米厚度的薄膜进行无损检测是开发高性能器件的需要。由于一些敏感膜的表面声波气体传感器有分层的问题，我的目的是开发无分层的敏感膜在传感器的操作和验证的有用性的评价，使用超声原子力显微镜和激光显微镜。作为传感器的灵敏度的评价和膜的观察的结果，发现显影的灵敏膜对于高灵敏度传感器是有用的。因此，达到了本研究的目的。

Nondestructive evaluation of thin films with a thickness of sub-μm is required for development of high-performance devices. Since some sensitive films for surface acoustic wave gas sensor have a problem of delamination, I aimed to develop delamination-free sensitive films during sensor operation and verify the usefulness of the evaluation using ultrasonic atomic force microscopy and laser microscopy. As a result of the evaluation of the sensitivity of the sensors and the observation of the films, it was found that developed sensitive films were useful for highly sensitive sensor. Therefore, the purpose of this study was achieved.