Development of Reactive Plasma Spray Process for Fabrication of High Quality Aluminum Nitride Coating

制备高质量氮化铝涂层的反应等离子喷涂工艺的开发

• 批准号: 21760583
• 负责人: YAMADA Motohiro
• 金额: $ 2.91万
• 依托单位: Toyohashi University of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Young Scientists (B)
• 财政年份: 2009
• 资助国家: 日本
• 起止时间: 2009 至 2010
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-21760583/
• 关键词: プラズマ溶射; 窒化アルミニウム; 窒化反応; コーティング

Aluminum nitride (AlN) possesses high thermal conductivity with dielectric property. AlN is very useful in several applications though it hasn't been developed a thick coating process. In this research, AlN coating was successfully fabricated by reactive plasma spray using nitrogen/hydrogen plasma for the reaction of feedstock aluminum or alumina powders. The crystal of the AlN coating was cubic structure which is similar to aluminum oxynitride. It became clear that the nitrding process of feedstock powder is through oxynitride phase during flight in the plasma.

氮化铝(AlN)具有较高的导热系数和介电性能。尽管AlN还没有发展成厚涂层工艺，但它在许多应用中都非常有用。在本研究中，以铝或氧化铝粉末为原料，采用氮氢等离子体反应等离子喷涂的方法成功地制备了AlN涂层。氮化铝涂层的晶体为类似于氮化铝的立方结构。结果表明，原料粉末的氮化过程是在等离子体中飞行时通过氧氮化物相进行的。

项目成果

Microstructure of Interfacial Region Between Cold-Sprayed Copper Coating and AlN Substrate Coated with Sputtered Titanium and Copper

• DOI: 10.1007/s11666-010-9522-z
• 发表时间: 2011-03
• 期刊: Journal of Thermal Spray Technology
• 影响因子: 3.1
• 作者: H. Nakano;M. Yamada;M. Fukumoto;E. Yamaguchi

Reaction and nitridation of Al2O3 powder in reactive atmospheric plasma spraying

Al2O3粉末在反应大气等离子喷涂中的反应与氮化

• 发表时间: 2011
• 期刊: Proceedings of Processing and Fabrication of Advanced Materials XIX
• 作者: M.Yamada;M.Shahien;T.Yasui;M.Fukumoto
• 通讯作者: M.Fukumoto

コールドスプレー法によるCFRP基材上への金属皮膜の作製

冷喷涂法在CFRP基体上制备金属薄膜

• 发表时间: 2010
• 作者: Keisuke Ueda;Tomo Ogura;Shumpei Nishiuchi;Kenji Miyamoto;Toshikazu Nanbu;Akio Hirose;Jon Affi
• 通讯作者: Jon Affi

Synthesis of titanium dioxide (TiO2) powders for cold spray

冷喷涂用二氧化钛（TiO2）粉末的合成

• 发表时间: 2011
• 期刊: Proceedings of Processing and Fabrication of Advanced Materials XIX
• 作者: H. Yamamoto;T. Kozawa;and S. Tagawa;N.Tjitra Salim
• 通讯作者: N.Tjitra Salim

Effect of ambient pressure on flattening behavior of thermal sprayed particles

环境压力对热喷涂颗粒扁平化行为的影响

• 发表时间: 2009
• 期刊: Journal of Thermal Spray Technology 18(4)
• 作者: Keisuke Ueda;Tomo Ogura;Shumpei Nishiuchi;Kenji Miyamoto;Toshikazu Nanbu;Akio Hirose;K.Yang
• 通讯作者: K.Yang