Separation and Recovery Process of Tetramethylammonium Hydroxide with Mesoporous Silica Adsorbent

研究了用吸附法分离和回收半导体、液晶厂废液中含有的氢氧化铵（TMAH）的工艺。吸附剂采用MCM-41。采用批量吸附法研究了MCM-41对TMAH的吸附性能。采用色谱法建立了吸附分离TMAH的工艺流程，并采用铝基粘结剂对MCM-41进行造粒。

Separation and recovery process of Tetramethylammonium hydroxide (TMAH), which is contained in waste solution from semiconductor or liquid crystal factories, are investigated based on adsorption technique. MCM-41 is used for the adsorbent. The adsorption properties of TMAH with MCM-41 have been investigated with batchwise adsorption. The chromatographic operation was also conducted to develop adsorptive separation process of TMAH, followed by granulation of MCM-41 with alumina-based binder.