Separation and Recovery Process of Tetramethylammonium Hydroxide with Mesoporous Silica Adsorbent

采用吸附法研究了半导体、液晶生产废液中四甲基氢氧化铵（TMAH）的分离回收工艺。MCM-41为吸附剂。采用间歇吸附法研究了MCM-41对TMAH的吸附性能。本文还研究了TMAH的吸附分离过程，以及MCM-41与氧化铝基粘结剂的造粒过程。

Separation and recovery process of Tetramethylammonium hydroxide (TMAH), which is contained in waste solution from semiconductor or liquid crystal factories, are investigated based on adsorption technique. MCM-41 is used for the adsorbent. The adsorption properties of TMAH with MCM-41 have been investigated with batchwise adsorption. The chromatographic operation was also conducted to develop adsorptive separation process of TMAH, followed by granulation of MCM-41 with alumina-based binder.