Direct micromachining of polydimethylsiloxane using laser plasma soft X-rays

研究了激光等离子体软X射线烧蚀法加工聚二甲基硅氧烷（PDMS）微机械。我们已经实现了一微米尺度的PDMS的精密微加工。激光等离子体软X射线入射到PDMS表面的功率密度决定了微加工性能，而波长对微加工性能没有影响。研究发现，即使在激光等离子体软X射线辐照后，化学结构也没有发生改变。因此，我们已经实现了适用于PDMS微加工的性能。

We have investigated poludimethylsilonxan (PDMS) micromaching by ablation using laser plasma soft X-rays. We have achieved precise michromachining of PDMS at one micrometer scale. The micromachining properties are governed by power density of incident laser plasma soft X-rays on PDMS surfaces, while the wavelength do not affect the properties. It is found that the chemical structures is not modified even after the irradiation of laser plasma soft X-rays. Thus, we have achieved proerties suitable for PDMS micromachining.