Development of wide range-nanometer resolution-real time measurement system of charged up specimen irradiated by electron beam

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Electrostatic force microscope system has been successfully completed to measure the potential distribution of a charged up insulator surface by electron beam irradiation. It is shown that the potential distribution built on a photo-mask, where an insulating film is on a conductive substrate, varies largely with the accelerating voltage and the current of the electron beam. On the other hand, we develop an electron trajectory simulation considering the behavior of electrons inside and outside of the specimen, and the result agrees well with the experimental result.