Development of GaN pH sensor for the surveillance of cell culture
Development of GaN pH sensor for the surveillance of cell culture
批准号:
22560332
负责人:
AO Jin-ping
金额:
$2.91万
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (C)
财政年份:
2010
资助国家:
日本
项目状态:
已结题
起止时间:
2010 至 2012
中文摘要
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英文摘要
The goal of this research project is the development of pH sensor based on AlGaN/GaN heterostructure for the surveillance of cell culture. TiN Schottky electrode which could stand high temperature was developed using reactive sputtering. By optimizing the fabrication process of GaN MOSFET on AlGaN/GaN heterostructure which can be used as pH sensor, device with electron mobility of about 160 cm2/Vs was obtained. Through the research steps of design, fabrication, implementation and device evaluation, proper operation up to 80・C was confirmed. In the whole temperature ranges, near ideal sensitivity values were achieved.
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Field Isolation of GaN MOSFET by Boron Ion Implantation
通过硼离子注入实现 GaN MOSFET 的场隔离
DOI:
--
发表时间:
2013
期刊:
影响因子:
--
作者:
[M. Nishimoto, D. Y oshida, K. Ogata, and M.Tanabe, Mineo Kaneko, Yoshinari Kamakura, Ying Jiang]
通讯作者:
Ying Jiang
Characterization of GaN MOSFETs on AlGaN/GaN Heterostructure
AlGaN/GaN 异质结构上 GaN MOSFET 的表征
DOI:
--
发表时间:
2012
期刊:
影响因子:
--
作者:
[T. Kinoshita, N. Sato and M. Yamada, Kentaro Kukita, Y. Kokubo, Qingpeng Wang]
通讯作者:
Qingpeng Wang
DOI:
10.1016/j.vacuum.2012.02.038
发表时间:
2013
期刊:
Vacuum
影响因子:
4
作者:
[J. Ao;Y. Naoi;Y. Ohno]
通讯作者:
J. Ao;Y. Naoi;Y. Ohno
GaN MOSFET with a gate SiO2insulator deposited by silane-basedplasma-enhanced chemical vapor deposition
具有通过硅烷基等离子体增强化学气相沉积沉积的栅极 SiO2 绝缘体的 GaN MOSFET
DOI:
10.1002/pssc.201000489
发表时间:
2011
期刊:
Phys. Status Solidi C
影响因子:
--
作者:
[Jin-Ping Ao, Katsutoshi Nakatani, Yuji Sogawa, Shiro Akamatsu, Young Hyun Kim, Takahiro Miyashita, Shin-ichi Motoyama, and Yasuo Ohno]
通讯作者:
and Yasuo Ohno
Oxide Thickness Dependency on Threshold Voltage of GaN MOSFETs on AlGaN/GaN Heterostructure
AlGaN/GaN 异质结构上 GaN MOSFET 的氧化物厚度对阈值电压的依赖性
DOI:
--
发表时间:
2013
期刊:
影响因子:
--
作者:
[岡田浩, 秦貴幸, 近藤正樹, 若原昭浩, 古川雄三, 大島武‡佐藤真一郎, Qingpeng Wang]
通讯作者:
Qingpeng Wang
共 16 条
Investigation of Refractory Metal Gate on AlGaN/GaN HFET
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批准号:18560337
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项目类别:Grant-in-Aid for Scientific Research (C)
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资助金额:$2.48万
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财政年份:2006
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负责人:AO Jin-ping
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依托单位:
海外基金