Development of nitride semiconductor substrate by using the reaction in high density medium

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Although AlN semi-conductor is promising for UV emitting device, power, significant power semi-conductors etc., it is not yet practically realized because the substrate made of AlN is not yet produced. In this work, it was tried to synthesize AlN by reacting Al metal with N_2 or NH_3 in the fluoride molten salts which was expected to remove the stable oxide film formed on the Al metal to promote the nitriding reaction. As the results, it was confirmed that the nitriding reaction was successfully brought forward even if the temperature was under the melting point of Al.