Resonant behavior control through ferroelectric polarization and its applications to vibratory MEMS devices with improved functionality

振动 MEMS（微机电系统）设备的功能已通过使用压电性和设备中铁电材料的铁电极化得到了改进。首先通过施加外部电压的逆压电应力来研究谐振频率控制，并阐明了应力的频率可控性以及振动板的形状对其可控性的影响。接下来，通过由于逆压电应力引起的器件板的静态变形以及通过铁电极化对齐来改善压电性能，揭示了施加电压对 MEMS 传感器性能的影响。我们最终以超声波阵列传感器及其阵列作为振动MEMS器件的实例来应用研究结果，并提出了一种改进其灵敏度和超分辨率测量技术的方法。

Functionalities of vibratory MEMS (micro-electro-mechanical systems) devices have been improved using piezoelectricity with ferroelectric polarization of the ferroelectric material in the device. Resonant frequency control has firstly been investigated through converse-piezoelectric stress by applying external voltage, and it has been clarified that the frequency controllability by the stress and the effect of the shape of the vibrating plate to the controllability. The effects of the applied voltage to the performance of MEMS sensors have next been revealed through static deformation of the device plate due to the converse-piezoelectric stress and improvement of piezoelectric properties through alignment of ferroelectric polarization. We have finally dealt with ultrasonic array sensor and its array as instances of the vibratory MEMS device to apply the results of the investigation and proposed an improvement method of their sensitivity and measurement technique with super-resolution.