Vector tactile sensing with single MEMS sensor using resonant frequencyshift

提出了一种基于MEMS器件的矢量触觉传感新技术。传统上，触觉矢量是通过多个传感器元件的组合来测量的，每个传感器元件只检测一个方向的力，而所提出的技术使单个传感器元件能够测量基于振动微悬臂谐振频移的触觉矢量。在有限元分析中证实了这一原理，并对悬臂式传感器进行了制作和评价。研究发现，传感器频率响应的非线性极大地影响了触觉矢量估计，设计并制作了一种改进的传感器结构，以减小传感器的非线性。

A new technique for vector tactile sensing with MEMS devices was proposed. While tactile vectors had been conventionally measured with a combination of plural sensor elements each of which detected force in only one direction, the proposed technique enabled a single sensor element to measure a tactile vector based on resonant frequency shift of a vibratory microcantilever. The principle was confirmed in finite element analysis and the cantilever sensors were fabricated and evaluated. It was found that nonlinearity in the frequency response of the sensors drastically affected the tactile vector estimation, and an improved sensor structure to reduce the nonlinearity was designed and fabricated.