Fabrication of single cell isolation structure and very narrow slit cell separation microchannel by semiconductor processing

本研究采用Ar/F2气相刻蚀工艺制备了无盖板的硅基微通道。我们成功地在微通道中运输了大肠杆菌细胞。我们还采用Ar/F2气相刻蚀和Cl2-ICP刻蚀工艺制作了无上盖板的硅基两步微通道。我们认为，利用所提出的技术缩短分析时间，有望在食物中毒等细胞研究、药物开发和快速反应检测方面取得进展。我们提出了一种由多柱微胶囊组成的筛分微生物细胞分离装置。只需滴加混合物，就可以将大肠杆菌和酿酒酵母的单个细胞分别捕获在更小和更大的微胶囊中。此外，我们还成功地在激光晶圆表面制作了多柱微胶囊。在本研究中，我们建立了利用微通道和微胶囊进行单细胞分离和细胞分离的基本技术。

In this research, Si-based microchannels without cover plates were fabricated by the Ar/F2 vapor etching process. We succeeded in the transport of E. coli cells in the microchannel. We also fabricated Si-based two-step microchannels without top cover plates by Ar/F2 vapor etching and Cl2-ICP etching processes. We think that the development of cell research, drug discovery, and rapid response measurement such as in food poisoning can be expected by shortening the analysis time using the proposed techniques.We propose a size sieving microbial cell separation apparatus consist of multipillar microenclosures. Single cells of Escherichia coli and Saccharomyces cerevisiae were separately captured in smaller and lager microenclosures just by dropping mixtures. Moreover, we succeeded in making multipillar microenclosures on surface emitting laser wafers.In this research, basic technologies on single cell isolation and cell separation using microchannel and microenclosure were established.