High sensitive three-dimensional vibration mode visualization systems accelerating microvibration device developments

压电器件用于包括信息和通信装置的许多电子设备中。有限元法（FEM）通常用于设计，并且它成为在设计检查实验中测量实验产生的压电器件的振动模式的令人信服的手段。通过实验检查，可以得到分析结果中没有的关于伪模式的信息。在本实验室，您提出了使用干涉光（散斑）和空气光的图像处理技术，使高速振动模式可视化的激光散斑方法，该方法是将激光束等相干光照射到粗糙处理的压电器件外观上时产生的。此外，振动分布的测量是可能的，在很短的时间内，因为我不需要机械扫描。

The piezoelectric device is used in much electronic equipment including an information and communication apparatus. FEM (finite element method) is usually used for the design, and it becomes the convincing means to measure the vibration mode of the piezoelectric device produced experimentally in design inspection experimentally. By experimental inspection, I can get the information about the spurious mode which is not provided from an analysis result.In this laboratory, you suggest the laser speckle method visualizing a vibration mode at high speed using interference light (speckle) and an image processing technology of the air-light to produce when you irradiated the coherent light such as the laser beam to piezoelectric device appearance handled coarsely. In addition, the measurement of the vibration distribution is possible very in a short time because I do not need mechanical scanning.