Accurate process planning of MEMS devices using multi-resolution mesh models

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The objective of this study is to enable designers who are not necessarily the experts on MEMS(Micro Electro Mechanical Systems) manufacturing processes to easily plan the feasible and low-cost manufacturing processes of MEMS devices. To achieve this, a prototype of the computer-aided process planning system of MEMS devices was developed where (1) all feasible process plans of the device could be searched for and (2) device shapes and structures easier to fabricate could be estimated automatically based on the multi-resolution mesh model of the devices.