Micro flow sensor based on the impedance of the electrical doubolelayer

点击翻译按钮获取中文摘要

We proposed an impedeance based flow sensor which measures the flow velocitythrough a micro channel on the basis of the interactions between the flow and theelectrical double layer . Several experiments were performed using an electrode chipfabricated by FIB. The results showed the following: (1) the impedance of the electrodechanges in approximate proportion with the flow velocity , (2) the real and imaginarycomponent of the impedance shows a different change, (3) the behavior of the twocomponents depends on the direction angle between the flow and the electric field.