Research on the ultra-thin film mechanical resonator for high resolution wavelength detection

本研究的目的是为下一代大容量接入网开发高分辨率波长检测器。利用纳米机械谐振器和等离子体结构对波长测量进行了研究。此外，为了实现高分辨率波长检测，还研究了Q因子改进方法。结果表明，利用谐振器钳形弯曲施加应变的方法可以获得高Q因数的机械谐振器。利用u形腔的纳米机械谐振器实现了分辨率为2.2 pm的波长探测。

Aim of this study is development of a high resolution wavelength detector for a next generation large-capacity access network. Wavelength measurement had been researched using a nanomechanical resonator and plasmonic structure. In addition, Q factor improvement method had been researched in order to achieve the high resolution wavelength detection. As a result, strain applying method using clamp bending of a resonator was useful to obtain a high Q factor mechanical resonator. And, the wavelength detection with a resolution of 2.2 pm was demonstrated by a nanomechanical resonator with U-shaped cavities.