A study on a polymer actuator device fabricated by using dry process

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In this research, we have developed a basic fabrication techniques for an ionic polymer conductive polymer actuator by using dry plasma processes as typical fabrication processes for conventional microelectromechanical systems (MEMS). Ionic polymer-metal composite (IPMC) is used as an ionic polymer conductive polymer actuator. In order to confirm the efficiencies of our developed techniques, a prototype of a miniaturized IPMC (0.1mm width, 10mm length) of cantilever-type was fabricated and the characteristics of it was evaluated. IPMCs of this size have been previously-unreported. As a result, we confirmed the operation of the fabricated miniaturized IPMCs and the effectiveness of our developed techniques.