Research of the nano-structure of magnets by molecular dynamics simulation and deposition parameter variation sputtering method

分子动力学模拟和沉积参数变化溅射法研究磁体纳米结构

基本信息

批准号：
09650367
负责人：
ITOH Akiyoshi
金额：
$ 1.86万
依托单位：
Nihon University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1998
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09650367/
关键词：
MOLECULAR DYNAMICS SIMULATION SUPER LATTICES NANOSTRUCTURE 微細構造

项目摘要

Recently, a giant magnetoresistance (GMR) effect was observed in superlattices comprised of alternating magnetic and nonmagnetic layers. Much attention has been devoted to the GMR of superlattices because of the application for high sensitive magnetoresistive heads. The GMR effect is very sensitive to the structure atthe interface of superlattices and the deposition parameter, however, the relationships between GMR and interface structure is still not clear.The purpose of this research is clarifying the structure of the interface at the nanoscopic scale and relationships between those structure and deposition parameter by using molecular dynamics simulations of film formation process.In 1998, for the purpose of clarifying the effect of the deposition parameters in sputtering on the structure of Co/Cu super lattices, molecular dynamics simulations have been performed for Co/Cu super lattices. The results as follows :1)For the case of low kinetic energies of incident atoms corresponding … More to evaporation method, it is suggested that the formation of pinholes might been caused because of the existence of roughness at surface in island growth mode.This may cause the low values of the magnetoresistance ratio because that the pinholes broken the anti-ferromagnetic coupling between Co layers.2)For the case of high kinetic energies of incident atoms corresponding to Ion-beam sputtering method, the interdiffusion at the interface is observed.3)The amount of interdiffusion at the interface strongly depend on the angle of incidence and the incident energy of atoms. At same incident energy of atoms, the amount of interdiffusion at the surface decrease with increasing the angle of incidence of atoms.The simulated results of the structure at the surface is good agreement with the previously reported experimental results of fabrication of nano-structure at surface by deposition parameter variation sputtering method (Ar gas pressure was varied during sputtering) (A.Tsukamoto, et. al, J.Magn. Soc. Jpn., Vol. 20.114 (1996) 349.). The molecular dynamics simulation is useful to know the nano-structure of magnets as mentioned above. Less

最近，在包括替代磁性和非磁性层的超级晶格中观察到了巨型磁阻（GMR）效应。由于应用高敏感磁头，因此非常关注超晶格的GMR。 GMR效应对超晶格和沉积参数的结构非常敏感，但是，GMR和界面结构之间的关系仍然不清楚。这项研究的目的是阐明纳米镜面尺度上的界面结构以及使用这些结构和沉积参数之间的结构和沉积参数之间的结构与膜形式的效果进行启用，以启用构建效果。 CO/CU超级晶格的结构，分子动力学模拟已经进行了CO/CU超级晶格。结果如下：1）对于入射原子对应的动能低的情况……更多地与经济方法相对于经济方法，建议可能是由于在岛上生长模式下表面存在粗糙度而引起的，这可能会导致磁磁比的低值，因为小针孔会使抗球的速度分配在较高的范围之间。与离子梁溅射法相对应的入射原子，观察到界面处的扩散。3）界面处的扩散量在很大程度上取决于入射角和原子的入射能。在原子的同一入射能量下，表面上的相互作用的量随着原子的入射角的增加而减小。表面结构的模拟结果与先前报道的先前报道的纳米结构在表面结构的实验结果一致。（1996）349。）。如上所述，分子动力学模拟可用于了解磁体的纳米结构。较少的