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Study on reflection type display using micro actuator

微驱动器反射式显示的研究

基本信息

批准号：
09650385
负责人：
KANEKO Reizo
金额：
$ 1.28万
依托单位：
Wakayama University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1999
项目状态：
已结题

项目摘要

A color display using the Fabry-Perot (FPI) interferometer was studied. The display had a simple matrix structure in which display pixels were formed at intersections of longitudinal electrodes and perpendicular electrodes. Fabrication process was the surface micromachining technology which is suitable for an accurate control of the cavity length between two (movable and fixed) mirrors of the interferometer. To display full colors, FPIs were combined with color filters of read, green, and blue at all pixels. To design the suitable device structure, electromechanical behaviors of the interferometer and relationships between various device parameters and color display characteristics were studied theoretically. Nickel was used as the mirror material and high heat-resistance fine polyimides for VLSI was used to sacrificial layers because its etchant does not attack the mirror material. The next technologies were established ; formations of the polyimides sacrificial layer and the silicon nitride patterns of movable mirror on the sacrificial layers, and formation of thin cavities between the movable mirror patterns of silicon nitride and the fixed mirrors by removing the sacrificial layers. To form the movable mirrors, silicon nitride layers and a very thin nickel layer were piled and these layer were patterned by etching. However, desirable movable mirrors (movable electrodes of micro actuators) could not be formed because of damages of patterns and cuttings of the electrodes at the step portions. We want to continue fabrication of the display after reviewing the materials, film thickness, deposition methods and deposition conditions of the movable mirrors.

研究了用FPI干涉仪进行彩色显示的方法。该显示器具有简单的矩阵结构，其中显示像素在纵向电极和垂直电极的交叉处形成。制造过程采用表面微加工技术，适于精确控制干涉仪两镜（动镜和固镜）之间的腔长。为了显示全彩色，fpi与所有像素的红色、绿色和蓝色滤色器相结合。为了设计合适的器件结构，从理论上研究了干涉仪的机电行为以及器件各参数与彩色显示特性之间的关系。采用镍作为镜面材料，采用高耐热聚酰亚胺作为牺牲层，因为它的蚀刻剂不会侵蚀镜面材料。下一个技术已经建立；在牺牲层上形成聚酰亚胺牺牲层和氮化硅动镜图案，通过去除牺牲层在氮化硅动镜图案和固定镜之间形成薄腔。为了形成可移动的镜子，氮化硅层和非常薄的镍层被堆积起来，这些层被蚀刻成图案。然而，由于微致动器的可动电极在步进部分的模式破坏和电极的切割，无法形成理想的可动镜。我们希望在对可移动反射镜的材料、薄膜厚度、沉积方法和沉积条件进行研究后，继续进行显示器的制作。