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DISCUSSION OF THE EFFECT OF ROTATING MAGNETIC FIELD ON CRYSTAL GROWTH

旋转磁场对晶体生长影响的讨论

基本信息

批准号：
09650834
负责人：
OZOE Hiroyuki
金额：
$ 2.18万
依托单位：
KYUSHU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1999
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09650834/
关键词：
CRYSTAL GROWTH ROTATING MAGNETIC FIELD GALLIUM TWO COILS MOTOR 磁場回転チョクラルスキー法

项目摘要

The electronic integrated circuits have been extensively developed to materialize the information technology society. The integrated circuits became more condensed and less energy dissipasive. The silicon wafer to constitute the base plate of the integrate circuit would become much more enlarged to become 14 to 16 inches diameter to reply for the increasing demand more efficiently. The crucible for manufacturing such a large rod would become much larger and the molten liquid of silicon would become more turbulent. To manufacture a single crystal rod safely and steadily, it would be necessary to calm the convection of the melt by applying a magnetic field from outside of the furnace. In the present research program, the rotating magnetic field is applied to see its effect on the convection of the liquid metal in a vertical cylindrical crucible. However, for this purpose, a little more simplified system of a cube was at first considered. The liquid metal in a cubic enclosure is heated an … More d cooled from opposing vertical walls with four other walls thermally insulated.Magnetic field was applied uniformly in parallel to both the hot and cold walls. At Ra = 10ィイD15ィエD1, Pr = 0.025 and Ha = 50, the average Nusselt number increased at least 5% than that without magnetic field. This contradicts to the common understanding that the magnetic field suppresses the convection and heat transfer rate (Paper 1). Then, a rotating magnetic field was studied theoretically for the liquid metal in a vertical cylinder. The numerical solution was successfully obtained for the dimensionless angular velocity Ω = 10ィイD13ィエD1 and 10ィイD14ィエD1 and Ha = 0.01 and 0.1. The maximum velocity occurred at 58% of the radius (Paper 2). Experimental approach was also carried out. However, the rotating magnetic field of static outer coil taken from a usual electric motor could not have rotated the gallium in a cylinder due to too much leakage of the magnetic field. After many trials, two coils rotating magnet successfully rotated the gallium. Less

电子集成电路已经被广泛地开发以实现信息技术社会。集成电路变得更加紧凑，能量消耗更少。构成集成电路基板的硅晶片将变得更大，直径为14至16英寸，以更有效地满足日益增长的需求。用于制造这种大棒的坩埚将变得更大，并且硅的熔融液体将变得更加湍流。为了安全稳定地制造单晶棒，有必要通过从炉外施加磁场来平息熔体的对流。在本研究计划中，施加旋转磁场，以了解其对垂直圆柱形坩埚中液态金属对流的影响。然而，为了这个目的，一个更简单的立方体系统首先被考虑。在一个立方体的封闭空间里，液态金属被加热， ...更多信息 d从相对的垂直壁冷却，另外四个壁绝热。磁场平行于热壁和冷壁均匀施加。当Ra = 10 μ m D ~（15）μ m D ~（1），Pr = 0.025，Ha = 50时，平均努塞尔数比无磁场时至少增加5%。这与磁场抑制对流和传热速率的共同理解相矛盾（论文1）。在此基础上，对垂直圆柱体中液态金属的旋转磁场进行了理论研究。成功地获得了无量纲角速度Ω = 10 D13 D1和10 D14 D1以及Ha = 0.01和0.1的数值解。最大速度发生在半径的58%处（论文2）。实验方法也进行了。然而，由于磁场泄漏太多，来自普通电动机的静态外线圈的旋转磁场不能使圆柱体中的镓旋转。经过多次试验，两个线圈旋转磁铁成功地旋转了镓。少