Fabrication and analysis of fiber-integrated micro-optical switches

光纤集成微光开关的制作与分析

• 批准号: 09650339
• 负责人: HANAIZUMI Osamu
• 金额: $ 2.05万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09650339/
• 关键词: optical switch; fiber integration; photonic crystal; autocloning; 歪み格子; 多重量子井戸; MBE; DBRミラー; 共振; 選択エッチング; InGaAs; InGaAlAs

3D photonic crystals are useful to control the direction of radiation from the active regions made of III V compound semiconductors. It is useful to obtain highly efficient fiber-integrated micro optical switches. We have fabricated optical waveguides in three-dimensional (3D) photonic crystals and observed propagation of light beams. Light beams with wavelengths of 1.15 mum propagate along the line defects formed in the 3D photonic crystals. The 3D photonic crystals consist of a-Si/SiO_2 multilayers laminated alternately by rf bias sputtering on a periodically hollowed silica substrate with a triangular lattice. The pit diameter is 0.2 p.m and the pitch of the lattice is 0.5 p.m. The thickness of each laminated layer is 0.2 p.m. Line defects are formed normal to the surface by laminating a-Si/SiO_2 multilayers with 10 periods on the substrate in which the corrugation patterns have been omitted in a certain area corresponding to the core. The measurements of transmittance normal to the surface show that the wavelength of 1.15 mum used in observation of propagation is in the passband for the one-dimensional (iD) periodic region corresponding to the core and in the stop band for the 3D periodic region corresponding to the cladding, respectively. Measurements show good agreement with finite-difference time-domain(FDTD) calculations.

三维光子晶体可用于控制由III-V化合物半导体制成的有源区的辐射方向。这对于获得高效的光纤集成微光开关具有重要意义。我们在三维光子晶体中制作了光波导，并观察到了光束的传输。波长为1.15微米的光束沿三维光子晶体中形成的线缺陷传播。三维光子晶体由a-Si/SiO_2多层膜组成，通过射频偏压溅射交替层叠在具有三角形晶格的周期性空心二氧化硅衬底上。凹坑直径为0.2 PM，格子节距为0.5 PM。每一层压层的厚度为0.2 PM。通过在衬底上叠层10个周期的a-Si/SiO_2多层膜形成垂直于表面的线缺陷，其中在与芯相对应的特定区域中省略了波纹图案。垂直于表面的透过率测量表明，用于观察传输的1.15微米波长分别位于对应于芯的一维(ID)周期区域的通带和对应于包层的3D周期区域的阻带内。测量结果与时域有限差分(FDTD)计算结果吻合较好。

项目成果

土岐 和啓: "光励起MQW面型光増幅器の作製と評価" 応用物理学会秋季学術講演会. 3a-ZC-7. 1107 (1997)

Kazuhiro Toki：“光泵浦MQW表面型光放大器的制造和评估”日本应用物理学会秋季学术会议3a-ZC-7（1997）。

佐藤 尚: "積層形偏光分離素子の2次元光回路へのハイブリッド集積" 電子情報通信学会論文誌C-I. J81-C-I 2巻. (1998)

Takashi Sato：“将堆叠偏振分离元件混合集成到二维光学电路中”IEICE Transactions C-I 第 2 卷（1998 年）。

O.Hanaizumi: "Optical waveguides in a-Si/SiO_2 subniciometer 3D phatonic crystals :Fabrication and observation" CLEQ/Europe '98. CPD2.5. なし (1998)

O.Hanaizumi：“a-Si/SiO_2 亚微米 3D 声子晶体中的光波导：制造和观察”CLEQ/Europe 98 无 (1998)。

S.Kawakami, T.Kawashima, and T.Sato: "Mechanism of shape-formation of 3D periodic nanostructures by bias sputtering" Appl.Phys.Lett., Jan.1999. vol.74, no.3. 463-465 (1999)

S.Kawakami、T.Kawashima 和 T.Sato：“通过偏置溅射形成 3D 周期性纳米结构的形状形成机制”Appl.Phys.Lett.，1999 年 1 月。

O.Hanaizumi: "Propagation of liglit beans along line defects formed in a-Si/SiO_2 three-dimenlional photoic uystals : Fabucatien and obseruation" Applied Physios Letteis. Vol.74 no.6. 777-779 (1999)

O.Hanaizumi：“沿着a-Si/SiO_2 三维光子晶体中形成的线缺陷传播光豆：Fabucatien 和观察”Applied Physios Letteis。