Fabrication and analysis of 3-dimensional structure with nano-particles by nano-explosion of metal oxide thin film

通过金属氧化物薄膜纳米爆炸制备和分析纳米粒子三维结构

• 批准号: 15310108
• 负责人: NAKANO Takashi
• 金额: $ 3.84万
• 依托单位: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15310108/
• 关键词: Photonic crystal; Optical disc; Super-RENS; Metal oxide; Phase change material; Near-field optics; Local plasmon; Birefringence

The relation between the focus position of laser beam and the pit formation by nano-explosion of metal-oxide thin film was analyzed. From this experiment, it is clear that the focus position control is very important to fabricate the nano-pits by nano-explosion, because the thermal property of platinum oxide film is very sensitive as compared with the intensity distribution in the focus spot. This sensitivity is very important to fabricate the 3-dimentional structure by focus position shift in the multi stacked platinum oxide thin film sandwiched by dielectric thin layers. The 150 nm size pits with platinum nano-particles were fabricated using a conventional disk drive tester.I designed the wave guide using the photonic crystal which was possible to fabricate by nano-explosion of platinum oxide layer sandwiched by dielectric layers and calculated its effect. I also designed the polarizer using nano-dots including nano metal-particles and estimated its effect. It became clear there was a possibility that the optical component was able to be made from this technique by these calculations.To make a nano-structure with high-aspect ratio, the property of nano-dots by nano-explosion as mask of a dry etching was estimated. To select the material, it was possible to give a large different etching rate between nano-hole and space. Therefore, it succeeded in making the nano-structure of a high aspect ratio (100 nm width, 500 nm depth).It is thought that the processing technology of the minute pit structure to use the nano-explosion of the proposed metallic oxide thin film was able to be established enough from these results. It wants to advance the improvement of the device, and to advance the optical device development by this technique in the future.

分析了激光束聚焦位置与金属氧化物薄膜纳米爆炸成坑的关系。实验结果表明，由于氧化铂薄膜的热特性对聚焦光斑的强度分布非常敏感，因此聚焦位置的控制对于纳米爆炸法制备纳米凹坑非常重要。这种灵敏度对于在多层介质膜中通过焦点位移来制作三维结构是非常重要的。利用传统的磁盘驱动器测试仪制作了150 nm大小的铂纳米颗粒凹坑，设计了基于纳米爆炸法制备的光子晶体波导，并计算了其效应。设计了一种纳米点（包括纳米金属颗粒）偏振器，并对其效果进行了评价。通过这些计算，我们可以清楚地看到，这种技术有可能制造出光学元件。为了制造高纵横比的纳米结构，我们估算了纳米爆炸作为干法蚀刻掩模的纳米点的性质。选择材料时，可以使纳米孔和空间的刻蚀速率有很大的差别。因此，成功地制造了高纵横比（宽度100 nm，深度500 nm）的纳米结构。从这些结果可以认为，能够充分确立利用所提出的金属氧化物薄膜的纳米爆炸的微小凹坑结构的加工技术。希望能促进器件的改进，并推动未来利用该技术的光学器件的发展。

项目成果

Signal Enhancement of Super Resolution Enhanced Near-field Structure Disc by Silver Nano-particles

银纳米颗粒对超分辨率增强近场结构盘的信号增强

• 发表时间: 2005
• 期刊: Jpn.J.Appl.Phys. 44・5B
• 作者: K.Kurihara;T.Arai;T.Nakano;J.Tominaga
• 通讯作者: J.Tominaga

Optical Near-field Recording

光学近场记录

• 发表时间: 2005
• 作者: J.Tominaga;T.Nakano
• 通讯作者: T.Nakano