Development of Ultra Precision Machining Shelter for Supporting Nano Technology

近年来，随着电子元件和光学元件对超精密加工的要求越来越高，对纳米技术的研究也越来越多，主要有离子束加工等超精密加工和扫描隧道显微镜等超精密测量技术。纳米技术受到器件的振动和温度变化以及器件周围的振动和温度变化的影响，然而，研究是为了减少环境的影响。温度波动和器件的热漂移没有做太多的工作。为此，本文研制了一种支持纳米技术的超精密加工掩体。超精密加工罩由具有真空条件和强制冷却的内罩和外罩组成。通过有限元分析(冷却管道的形状、厚度、距离)，设计了合适的防护罩。脱壳器的颜色被认为是辐射的。在实验中，测量了方舱内的温度波动、换热系数波动和测量精度，并对方舱的热稳定性进行了评价。研究结果表明：(1)提出的方舱结构对减小方舱内环境温度波动和换热系数波动是非常有效的。(2)研制的防护罩对支持纳米技术是有用的。

Recently, as an electronic part and an optical part with ultra precision are required, the research about nano technology is done very much ; those are an ultra precision machining such as a ion beam machining and an ultra precision measurement such as STM technology. Nano technology is influenced from the vibration and temperature change of the device and the vibration and temperature change around the device, However, the research in order to reduce an ambient. temperature fluctuation and the thermal drift of the device isn't done very much. Therefore, in this report, an ultra precision machining shelter for supporting nano technology has been developed. The ultra precision machining shelter consist of an inner and an outer shelter with vacuum condition and compulsory cooling. The shelter was designed suitably by FEM analysis (form, thickness, distance of cooling pipe). The color of the Sheller was considered radiation. In the experiment, temperature fluctuation, heat transfer coefficient fluctuation and measurement precision in the shelter were measured, and the thermal stability in the shelter was evaluated . It is concluded from the results that (1) the proposed shelter structure are very effective in order to reduce ambient temperature fluctuation and heat transfer coefficient fluctuation in the shelter. (2) the developed shelter are useful for supporting nano technology.