Development of Ultra Precision Machining Shelter for Supporting Nano Technology

近年来，由于对电子器件和光学器件的超精密要求，纳米技术的研究越来越多；它们是离子束加工等超精密加工和STM技术等超精密测量。纳米技术受器件本身的振动和温度变化以及器件周围的振动和温度变化的影响，而本研究的目的是为了减小器件周围的振动和温度变化。器件的温度波动和热漂移没有得到很好的处理。因此，在本报告中，开发了一种支持纳米技术的超精密加工外壳。超精密机加工防护罩由内防护罩和外防护罩组成，具有真空条件和强制冷却。通过有限元分析（冷却管的形式、厚度、间距），设计了合适的遮蔽体。贝壳的颜色被认为是辐射。在实验中，测量了遮蔽内的温度波动、传热系数波动和测量精度，并对遮蔽内的热稳定性进行了评价。结果表明：(1)所提出的遮蔽结构对于降低遮蔽内环境温度波动和换热系数波动非常有效。(2)发达的遮蔽物有利于支撑纳米技术。

Recently, as an electronic part and an optical part with ultra precision are required, the research about nano technology is done very much ; those are an ultra precision machining such as a ion beam machining and an ultra precision measurement such as STM technology. Nano technology is influenced from the vibration and temperature change of the device and the vibration and temperature change around the device, However, the research in order to reduce an ambient. temperature fluctuation and the thermal drift of the device isn't done very much. Therefore, in this report, an ultra precision machining shelter for supporting nano technology has been developed. The ultra precision machining shelter consist of an inner and an outer shelter with vacuum condition and compulsory cooling. The shelter was designed suitably by FEM analysis (form, thickness, distance of cooling pipe). The color of the Sheller was considered radiation. In the experiment, temperature fluctuation, heat transfer coefficient fluctuation and measurement precision in the shelter were measured, and the thermal stability in the shelter was evaluated . It is concluded from the results that (1) the proposed shelter structure are very effective in order to reduce ambient temperature fluctuation and heat transfer coefficient fluctuation in the shelter. (2) the developed shelter are useful for supporting nano technology.