权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

A Stable Parametrically Amplified Gyroscope

稳定的参数放大陀螺仪

基本信息

批准号：
EP/G029296/1
负责人：
Barry Gallacher
金额：
$ 18.24万
依托单位：
Newcastle University
依托单位国家：
英国
项目类别：
Research Grant
财政年份：
2009
资助国家：
英国
起止时间：
2009 至无数据
项目状态：
已结题

来源：
https://gtr.ukri.org/projects?ref=EP%2FG029296%2F1
关键词：
Stable Parametrically Amplified Gyroscope

项目摘要

Despite the huge industrial and academic effort in advancing both the precision of the fabrication, mass trimming and signal processing there is still a considerable amount of improvement required before MEMS gyroscopes challenge the performance of other gyroscopic technologies. The objective of the proposed research is to develop an excitation scheme to enable stable parametric amplification of the Q-factors of the sense and drive modes of vibration of a typical electrostatically driven MEMS gyroscope and thus improve gyroscopic performance by at least an order of magnitude. Parametric amplification reduces the amount of total damping (viscous and thermoelastic) present in a resonator and may be interpreted as amplification in the effective Q-factor or as force amplification. Mis-tuning between the important modes of vibration must be minimised in conventionally excited gyroscopes to realise high performance. By employing parametric excitation and amplification the degree of mis-tuning that can be tolerated is increased and will allow the affect of Q-factor amplification on the gyroscope performance to be maximised. Eradicating the need to precisely tune the modes is in itself an important development and when combined with the parametric amplification of the Q-factor the prospect of a step change in MEMS gyroscope performance is a distinct possibility. It has the potential to transform a gyroscope which is rate grade to tactical grade. This work is also very applicable to resonant MEMS/NEMS sensors in general where high Q-factors are essential for the sensor performance. We propose to establish the full extent of amplification possible via parametric action, its limiting factors and develop the scheme necessary to use it optimally in actual MEMS gyroscopes.

尽管工业界和学术界在提高制造精度、质量微调和信号处理方面付出了巨大的努力，但在 MEMS 陀螺仪挑战其他陀螺仪技术的性能之前，仍需要大量改进。本研究的目的是开发一种激励方案，以实现典型静电驱动 MEMS 陀螺仪振动传感和驱动模式 Q 因子的稳定参数放大，从而将陀螺仪性能提高至少一个数量级。参数放大减少了谐振器中存在的总阻尼（粘性和热弹性）量，并且可以解释为有效 Q 因子的放大或力放大。在常规激励陀螺仪中，必须最大限度地减少重要振动模式之间的失调，以实现高性能。通过采用参数激励和放大，可以容忍的失谐程度增加，并且将允许Q因子放大对陀螺仪性能的影响最大化。消除精确调谐模式的需要本身就是一项重要的发展，当与 Q 因子的参数放大相结合时，MEMS 陀螺仪性能的阶跃变化的前景是明显的可能。它有可能将速率级陀螺仪转变为战术级陀螺仪。这项工作也非常适用于一般谐振 MEMS/NEMS 传感器，其中高 Q 因子对于传感器性能至关重要。我们建议通过参数作用建立可能的完整放大范围、其限制因素，并开发在实际 MEMS 陀螺仪中最佳使用它所需的方案。