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Copy of UHF-120 Polytec Ultra-High Frequency Laser Vibrometer

UHF-120 Polytec 超高频激光测振仪的副本

基本信息

批准号：
EP/L001268/1
负责人：
Barry Gallacher
金额：
$ 7.79万
依托单位：
Newcastle University
依托单位国家：
英国
项目类别：
Research Grant
财政年份：
2013
资助国家：
英国
起止时间：
2013 至无数据
项目状态：
已结题

来源：
https://gtr.ukri.org/projects?ref=EP%2FL001268%2F1
关键词：
Copy UHF 120 Polytec Ultra

项目摘要

The past decade has seen an explosion in the number of high frequency micro-manufactured devices being developed. Well-known examples include RF-Micro-Electro-Mechanical-Systems (RF-MEMS), Surface Acoustic Wave (SAW) devices for applications in biosensing, SAW devices for applications in digital signal processing (DSP), ultrasound transducers for applications in medical imaging and finally micromachined sonotrodes used in ultrasonic welding technology. This growth will continue as Nano-Electro-Mechanical (NEMS) become more prevalent due to developments in fabrication techniques and materials. For example, the unique electrical and mechanical properties offered by graphene will see devices developed with ever increasing resonant frequencies. An essential part in the development of high frequency devices is the measurement of their dynamic behaviour. This includes natural frequencies, modeshapes, displacement fields and support loss mechanisms. This is critical for design optimisation, optimising process steps and validating any model or simulation. The measurement options available for high frequency systems where displacements may be of the order of picometres are extremely limited and only a few options exist. Contacting characterisation techniques e.g. AFM, load the device and therefore prevent a true accurate measurement of its dynamics. High frequency laser vibrometry presents the only non-invasive measurement option. We aim to purchase a ultra-high frequency laser vibrometer to enable dynamic characterisation of high frequency microsystems. This equipment will allow the displacement or velocity field of any structure will greater than 4% reflectivity to be measured with picometre resolution and up to a frequency of 1.2 GHz. It will therefore be ideal for characterising SAW devices, high frequency N/MEMS sensors and RF MEMS.

在过去的十年里，正在开发的高频微制造设备的数量出现了爆炸性增长。众所周知的例子包括射频微电子机械系统(RF-MEMS)、用于生物传感的表面声波(SAW)器件、用于数字信号处理(DSP)的SAW器件、用于医学成像的超声换能器以及用于超声波焊接技术的微机械声电极。随着制造技术和材料的发展，纳米机电(NEMS)变得更加普遍，这种增长将继续下去。例如，石墨烯提供的独特的电气和机械性能将使设备的谐振频率不断提高。开发高频器件的一个重要部分是测量它们的动态行为。这包括固有频率、振型、位移场和支座损失机制。这对于优化设计、优化工艺步骤以及验证任何模型或模拟都至关重要。对于位移可能在皮米数量级的高频系统，可用的测量选项极其有限，并且只存在几个选项。接触表征技术，如原子力显微镜，加载设备，因此无法真正准确地测量其动态。高频激光测振是唯一的非侵入性测量选择。我们的目标是购买一台超高频激光测振仪，以实现高频微系统的动态表征。该设备将允许测量任何反射率大于4%的结构的位移场或速度场，分辨率为皮米，频率高达1.2 GHz。因此，它将是表征声表面波器件、高频N/MEMS传感器和RFMEMS的理想选择。